Wong, A. K. (2001). Resolution enhancement techniques in optical lithography. SPIE Press.
Chicago Style (17th ed.) CitationWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. Bellingham, Wash: SPIE Press, 2001.
MLA (9th ed.) CitationWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE Press, 2001.
Warning: These citations may not always be 100% accurate.