Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Karlsruhe
FZKA
2001
|
| Ausgabe: | Als Ms. gedr. |
| Schriftenreihe: | Wissenschaftliche Berichte / Forschungszentrum Karlsruhe Technik und Umwelt
6606 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Zsfassung in dt. Sprache |
| Beschreibung: | 29 S. Ill., graph. Darst. |
Internformat
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| 245 | 1 | 0 | |a Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation |c Forschungszentrum Karlsruhe GmbH, Karlsruhe. G. Dattoli ... |
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| 650 | 7 | |a Extremes Ultraviolett |2 swd | |
| 650 | 7 | |a Strahler |2 swd | |
| 650 | 7 | |a Synchrotronstrahlung |2 swd | |
| 700 | 1 | |a Dattoli, Giuseppe |e Sonstige |4 oth | |
| 710 | 2 | |a Forschungszentrum Karlsruhe |e Sonstige |0 (DE-588)2142794-X |4 oth | |
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| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009522044 | |
Datensatz im Suchindex
| _version_ | 1807319723861344256 |
|---|---|
| adam_text |
CONTENTS
1.
INTRODUCTION
.
1
2.
INCOHERENT
RADIATION
FROM
THE
STORAGE
RINGS
.
3
3.
THE
FREE
ELECTRON
LASER
APPROACH
.
7
4.
POSSIBLE
LAYOUT
OF
THE
FEL
SOURCE
.
13
5.
CONCLUSION
.
14
6.
ACKNOWLEDGEMENTS
.
15
7.
LITERATURE
.
16 |
| any_adam_object | 1 |
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| id | DE-604.BV013917210 |
| illustrated | Illustrated |
| indexdate | 2024-08-14T00:13:21Z |
| institution | BVB |
| institution_GND | (DE-588)2142794-X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009522044 |
| oclc_num | 76286485 |
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| owner | DE-12 |
| owner_facet | DE-12 |
| physical | 29 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | FZKA |
| record_format | marc |
| series2 | Wissenschaftliche Berichte / Forschungszentrum Karlsruhe Technik und Umwelt |
| spelling | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation Forschungszentrum Karlsruhe GmbH, Karlsruhe. G. Dattoli ... FZKA 6606 Als Ms. gedr. Karlsruhe FZKA 2001 29 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Wissenschaftliche Berichte / Forschungszentrum Karlsruhe Technik und Umwelt 6606 Zsfassung in dt. Sprache Extremes Ultraviolett swd Strahler swd Synchrotronstrahlung swd Dattoli, Giuseppe Sonstige oth Forschungszentrum Karlsruhe Sonstige (DE-588)2142794-X oth Forschungszentrum Karlsruhe Technik und Umwelt Wissenschaftliche Berichte 6606 (DE-604)BV010181833 6606 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009522044&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation Extremes Ultraviolett swd Strahler swd Synchrotronstrahlung swd |
| title | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation |
| title_alt | FZKA 6606 |
| title_auth | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation |
| title_exact_search | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation |
| title_full | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation Forschungszentrum Karlsruhe GmbH, Karlsruhe. G. Dattoli ... |
| title_fullStr | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation Forschungszentrum Karlsruhe GmbH, Karlsruhe. G. Dattoli ... |
| title_full_unstemmed | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation Forschungszentrum Karlsruhe GmbH, Karlsruhe. G. Dattoli ... |
| title_short | Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation |
| title_sort | extreme ultraviolet euv sources for lithography based on synchrotron radiation |
| topic | Extremes Ultraviolett swd Strahler swd Synchrotronstrahlung swd |
| topic_facet | Extremes Ultraviolett Strahler Synchrotronstrahlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009522044&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV010181833 |
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