Materials science of microelectromechanical systems (MEMS) devices II: symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2000
|
| Schriftenreihe: | Materials Research Society symposia proceedings
605 |
| Schlagworte: | |
| Beschreibung: | XIII, 314 S. Ill., graph. Darst. |
| ISBN: | 1558995137 |
Internformat
MARC
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| 300 | |a XIII, 314 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society symposia proceedings |v 605 | |
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Datensatz im Suchindex
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| dewey-ones | 621 - Applied physics |
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1999 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1999 Boston Mass. |
| id | DE-604.BV013870177 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:53:29Z |
| institution | BVB |
| isbn | 1558995137 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009487450 |
| oclc_num | 44627417 |
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| physical | XIII, 314 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposia proceedings |
| series2 | Materials Research Society symposia proceedings |
| spelling | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed.: Maarten P. de Boer ... Warrendale, Pa. Materials Research Soc. 2000 XIII, 314 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 605 Microactuators Materials Congresses Microelectromechanical systems Congresses Microelectronics Materials Congresses Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Boston Mass. gnd-content Werkstoff (DE-588)4065579-9 s Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 De Boer, Maarten P. Sonstige oth Materials Research Society symposia proceedings 605 (DE-604)BV001899105 605 |
| spellingShingle | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. Materials Research Society symposia proceedings Microactuators Materials Congresses Microelectromechanical systems Congresses Microelectronics Materials Congresses Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)4065579-9 (DE-588)1071861417 |
| title | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_auth | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_exact_search | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_full | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed.: Maarten P. de Boer ... |
| title_fullStr | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed.: Maarten P. de Boer ... |
| title_full_unstemmed | Materials science of microelectromechanical systems (MEMS) devices II symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed.: Maarten P. de Boer ... |
| title_short | Materials science of microelectromechanical systems (MEMS) devices II |
| title_sort | materials science of microelectromechanical systems mems devices ii symposium held november 29 december 1 1999 boston massachusetts u s a |
| title_sub | symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| topic | Microactuators Materials Congresses Microelectromechanical systems Congresses Microelectronics Materials Congresses Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| topic_facet | Microactuators Materials Congresses Microelectromechanical systems Congresses Microelectronics Materials Congresses Mikromechanik Mikroelektronik Werkstoff Konferenzschrift 1999 Boston Mass. |
| volume_link | (DE-604)BV001899105 |
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