Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000: dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | German |
| Veröffentlicht: |
Bremerhaven
Wirtschaftsverl. NW, Verl. für Neue Wiss.
2000
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| Schriftenreihe: | PTB-Bericht
Abteilung Fertigungsmeßtechnik ; 39 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | 225 S. Ill., graph. Darst. |
| ISBN: | 389701503X |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV013840969 | ||
| 003 | DE-604 | ||
| 005 | 20010801 | ||
| 007 | t | ||
| 008 | 010731s2000 gw ad|| t||| 00||| ger d | ||
| 020 | |a 389701503X |9 3-89701-503-X | ||
| 035 | |a (OCoLC)248275822 | ||
| 035 | |a (DE-599)BVBBV013840969 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a ger | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-12 |a DE-29T | ||
| 084 | |a ZM 9450 |0 (DE-625)157223: |2 rvk | ||
| 088 | |a PTB F 39 | ||
| 111 | 2 | |a Seminar on Quantitative Microscopy |n 4 |d 2000 |c Semmering |j Verfasser |0 (DE-588)3049082-0 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 |b dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria |c Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| 246 | 1 | 3 | |a Dimensional measurements in the micro- and nanometre range |
| 264 | 1 | |a Bremerhaven |b Wirtschaftsverl. NW, Verl. für Neue Wiss. |c 2000 | |
| 300 | |a 225 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a PTB-Bericht : Abteilung Fertigungsmeßtechnik |v 39 | |
| 500 | |a Literaturangaben | ||
| 655 | 7 | |8 1\p |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Hasche, Klaus |e Sonstige |4 oth | |
| 710 | 2 | |a Physikalisch-Technische Bundesanstalt |b Abteilung Fertigungsmesstechnik |e Sonstige |0 (DE-588)2094023-3 |4 oth | |
| 830 | 0 | |a PTB-Bericht |v Abteilung Fertigungsmeßtechnik ; 39 |w (DE-604)BV000628479 |9 39 | |
| 856 | 4 | 2 | |m GBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009467647&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009467647 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804128674658648064 |
|---|---|
| adam_text | PHYSIKALISCH-TECHNISCHEBUNDESANSTALT FERTIGUNGSMESSTECHNIK PTB-BERICHT
F-39 PROCEEDINGS OF THE 4TH SEMINAR ON QUANTITATIVE MICROSCOPY QM 2000
DIMENSIONAL MEASUREMENTS IN THE MICRO- AND NANOMETRE RANGE -
APPLICATIONS - CHALLENGES - STATE-OF-THE-ART - JANUARY 12TH -14TH, 2000,
SEMMERING, AUSTRIA BY KLAUS HASCHE, WERNER MIRANDE AND GIINTER WILKENING
(EDS.) UNIVERSITATSBIBLIOTHEK HANNOVER TECHNISCHE INFORMATIONSBIBLIOTHEK
PTB-F-39 BRAUNSCHWEIG, JANUARY 2000 ISSN 0179-0609 ISBN 3-89701-503-X
TABLE OF CONTENTS FOREWORD CONTRIBUTIONS STANDARDS, CALIBRATION AND
MEASUREMENT METHODS INJECTION MOLDED PLASTIC CHIP FOR CALIBRATION OF
SCANNING PROBE 1 MICROSCOPES GOBRECHT, J.; SCHIFT, H.; DAVID, C;
KAISER,W.; D AMORE, A.; SIMONETA, D.; SCANDELLA, L. GRADIENT COMPOSITE
REPLICAS FROM PROTEIN CRYSTAL LAYER TEMPLATES 8 PRODUCED BY PULSED LASER
DEPOSITION SAHRE, M.; REETZ, S.; LINDNER, B.; MEDOVIC, A.; SLEYTR, U.B.;
NEUBAUER, A; KAUTEK, W.; CALIBRATION OF 2 DIMENSIONAL MAGNIFICATION
STANDARDS FOR SPMS AND 17 SEMS THROUGH OPTICAL DIFFRACTION: METHOD
TRACEABILITY AND UNCERTAINTIES NUNN, J. CALIBRATION OF TRANSFER
STANDARDS FOR SPM 25 KOENDERS, L.; KRUGER-SEHM, R.; WILKENING, G.
ELECTROMECHANICAL POLYPROPYLENE FILMS AS CANDIDATES FOR A HEIGHT 30
CALIBRATION STANDARD IN SPM PELTONEN, J.; PAAJANEN, M.; LEKKALA, J.
METHOD FOR LATERAL CALIBRATION OF SCANNING PROBE MICROSCOPES BASED 36 ON
TWO DIMENSIONAL TRANSFER STANDARDS KOFOD, N.; GARNAES, J.; JORGENSEN, J.
INTERFEROMETRIC CALIBRATION OF A CAPACITANCE DISPLACEMENT SENSOR 44 OVER
SHORT DISPLACEMENT RANGES KONING, R.; DIXSON, R.; FU, J.; PENG, G.-S.;
VORBURGER, T.V. HEIGHT CALIBRATION IN TAPPING MODE AFM: PROBLEMS AND
PROSPECTS 52 BASNAR.B.; MADERA, M.; FRIEDBACHER, G.; MAYER, U.;
HOFFMANN, H. CRITICAL DIMENSION (CD) MEASUREMENTS USING A METROLOGY AFM
58 PROFILER MELI, F. COMPARISON OF OPTICAL AND SEM PHOTOMASK LINEWIDTH
MEASUREMENTS 66 MIRANDE, W.; FRASE, C.G.; BOSSE, H. EDGE ROUGHNESS OF
CHROMIUM STRUCTURES ON PHOTOMASKS 75 HAGLER-GROHNE, W. RECOGNIZING
OBJECTS IN DIMENSIONAL MICRO METROLOGY 81 HUSER, D.; ROTHE, H.;
PETERSEN, R. DIFFERENTIAL IMAGE CORRECTION 90 POLLAK, C; STUBBINGS, T.;
HUTTER, H. INDUSTRIAL NANOMETROLOGY - METROLOGY FOR THE NEXT DECADE 111
WESTKAMPER, E.; KRAUS, M.R.H. APPLICATIONS INVESTIGATION OF THE
ORIENTATION OF SUPRAMOLECULAR PROTEIN STRUCTURES 118 (S-LAYERS) ON
SILICON, GOLD, AND LIPID FILMS BY SCANNMG FORCE MICROSCOPY NEUBAUER, A.;
GYORVARY, E.; PUM, D.; SARA, M.; SLEYTR, U.B. ATOMIC FORCE MICROSCOPY
MEASUREMENTS OF SURFACE ROUGHNESS 124 QUANTITIES IMPORTANT IN OPTICS OF
SURFACES AND THIN FILMS OHLIDAL, I; FRANTA, D.; KLAPETEK, P. ACCURACY
RAISE OF MICRO- AND NANOHARDNESS MEASUREMENTS BY 132 DETERMINATION OF
THE INDENTER GEOMETRY WITH A SCANNING FORCE MICROSCOPE HERRMANN, K.;
HASCHE, K.; POHLENZ, F.; SEEMANN, R METROLOGY NEEDS IN MST 139 FRIES,
TH. DEFECTS, DETECTION AND MEASUREMENT ON POLISHED SILICON WAFER 144
SURFACE BY ATOMIC FORCE MICROSCOPE LEE, W.P.; SEOW, W.S.; YOW, H.K.;
TOU, T.Y. SOME EXPERIMENTAL RESULTS IN NANOMETROLOGY 151 HUANG, W.; XIA,
Y.; YUE, W.; FERNANDEZ, R.; BARO, A.M.; ESTEFANIA, J.V.A.
INSTRUMENTATION QUANTITATIVE MEASUREMENTS WITH SCANNING NEAR-FIELD
OPTICAL 156 MICROSCOPY ROSENBERGER, A.; EGGERS, G.; KIEDL, F.;
FUMAGALLI, P.; GUNTHERODT, G.; KLOCKE, V. A PRECISION Z-STAGE FOR
SCANNING PROBE MICROSCOPY 164 PICOTTO, G.B.; PISANI, M. CORRECTING
ONLINE FOR THE HYSTERESIS OF A SCANNING PROBE MICROSCOPE 169 DIRSCHERL,
K.; GARNAES, J.; JORGENSEN, J.F.; NIELSEN, L.; SORENSEN, M.P. CREEP AND
HYSTERESIS IN PIEZOELECTRIC ACTUATORS 175 KOOPS, K.R.; SCHOLTE,
P.M.L.O.; DE KONING, W.L LINEAR MOVEMENT OF PIEZOELECTRIC ACTUATORS 182
HARMS, C.H. QUANTITATIVE MEASURING SYSTEM OF A FLEXIBLE MICROROBOT-BASED
MICRO- 191 ASSEMBLY STATION BURKLE, A.; SCHMOECKEL, F. SIMULATION OF THE
DYNAMIC BEHAVIOUR OF A NANOMETER COORDINATE 199 MEASURING MACHINE (NCMM)
ROTHE, H.; PETERSEN, R.; HUSER, D. DEVELOPMENT OF THE SPACE AFM FOR
INTERPLANETARY MISSIONS 209 HOWALD, L; AKIYAMA, T.; GAUTSCH, S.; HIDBER,
H.-R.; MULLER, D.; NIEDERMANN, PH.; PIKE, T.FTONIN, A.; STAUFER, U. AFM
EXPERIMENTS IN ULTRA-HIGH VACUUM AT VARIABLE TEMPERATURES 214 FELTZ, A.;
BREIL, R.; BERGHAUS, T. DEVELOPMENT OF SCANNING PROBE MICROSCOPY WITH
SUBNANOMETRIC 219 CAPABILITY HASCHE,K.; HERRMANN, K.; MIRANDE, W.;
POHLENZ, F.; SEEMANN, R.
|
| any_adam_object | 1 |
| author_corporate | Seminar on Quantitative Microscopy Semmering |
| author_corporate_role | aut |
| author_facet | Seminar on Quantitative Microscopy Semmering |
| author_sort | Seminar on Quantitative Microscopy Semmering |
| building | Verbundindex |
| bvnumber | BV013840969 |
| classification_rvk | ZM 9450 |
| ctrlnum | (OCoLC)248275822 (DE-599)BVBBV013840969 |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02136nam a2200397 cb4500</leader><controlfield tag="001">BV013840969</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20010801 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">010731s2000 gw ad|| t||| 00||| ger d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">389701503X</subfield><subfield code="9">3-89701-503-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)248275822</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013840969</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 9450</subfield><subfield code="0">(DE-625)157223:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="088" ind1=" " ind2=" "><subfield code="a">PTB F 39</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Seminar on Quantitative Microscopy</subfield><subfield code="n">4</subfield><subfield code="d">2000</subfield><subfield code="c">Semmering</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)3049082-0</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000</subfield><subfield code="b">dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria</subfield><subfield code="c">Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit]</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Dimensional measurements in the micro- and nanometre range</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bremerhaven</subfield><subfield code="b">Wirtschaftsverl. NW, Verl. für Neue Wiss.</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">225 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">PTB-Bericht : Abteilung Fertigungsmeßtechnik</subfield><subfield code="v">39</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="8">1\p</subfield><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hasche, Klaus</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Physikalisch-Technische Bundesanstalt</subfield><subfield code="b">Abteilung Fertigungsmesstechnik</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)2094023-3</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">PTB-Bericht</subfield><subfield code="v">Abteilung Fertigungsmeßtechnik ; 39</subfield><subfield code="w">(DE-604)BV000628479</subfield><subfield code="9">39</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009467647&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009467647</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
| genre | 1\p (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV013840969 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:53:00Z |
| institution | BVB |
| institution_GND | (DE-588)3049082-0 (DE-588)2094023-3 |
| isbn | 389701503X |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009467647 |
| oclc_num | 248275822 |
| open_access_boolean | |
| owner | DE-12 DE-29T |
| owner_facet | DE-12 DE-29T |
| physical | 225 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Wirtschaftsverl. NW, Verl. für Neue Wiss. |
| record_format | marc |
| series | PTB-Bericht |
| series2 | PTB-Bericht : Abteilung Fertigungsmeßtechnik |
| spelling | Seminar on Quantitative Microscopy 4 2000 Semmering Verfasser (DE-588)3049082-0 aut Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] Dimensional measurements in the micro- and nanometre range Bremerhaven Wirtschaftsverl. NW, Verl. für Neue Wiss. 2000 225 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier PTB-Bericht : Abteilung Fertigungsmeßtechnik 39 Literaturangaben 1\p (DE-588)1071861417 Konferenzschrift gnd-content Hasche, Klaus Sonstige oth Physikalisch-Technische Bundesanstalt Abteilung Fertigungsmesstechnik Sonstige (DE-588)2094023-3 oth PTB-Bericht Abteilung Fertigungsmeßtechnik ; 39 (DE-604)BV000628479 39 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009467647&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria PTB-Bericht |
| subject_GND | (DE-588)1071861417 |
| title | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria |
| title_alt | Dimensional measurements in the micro- and nanometre range |
| title_auth | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria |
| title_exact_search | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria |
| title_full | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| title_fullStr | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| title_full_unstemmed | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria Physikalisch-Technische Bundesanstalt, Fertigungsmeßtechnik ; [Physikalisch-Technische Bundesanstalt]. By Klaus Hasche ... (ed.). [Hrsg.: Physikalisch-Technische Bundesanstalt Braunschweig und Berlin, Presse und Öffentlichkeitsarbeit] |
| title_short | Proceedings of the 4th Seminar on Quantitative Microscopy QM 2000 |
| title_sort | proceedings of the 4th seminar on quantitative microscopy qm 2000 dimensional measurements in the micro and nanometre range applications challenges state of the art january 12th 14th 2000 semmering austria |
| title_sub | dimensional measurements in the micro- and nanometre range ; applications, challenges, state-of-the-art ; January 12th - 14th, 2000, Semmering, Austria |
| topic_facet | Konferenzschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009467647&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000628479 |
| work_keys_str_mv | AT seminaronquantitativemicroscopysemmering proceedingsofthe4thseminaronquantitativemicroscopyqm2000dimensionalmeasurementsinthemicroandnanometrerangeapplicationschallengesstateoftheartjanuary12th14th2000semmeringaustria AT hascheklaus proceedingsofthe4thseminaronquantitativemicroscopyqm2000dimensionalmeasurementsinthemicroandnanometrerangeapplicationschallengesstateoftheartjanuary12th14th2000semmeringaustria AT physikalischtechnischebundesanstaltabteilungfertigungsmesstechnik proceedingsofthe4thseminaronquantitativemicroscopyqm2000dimensionalmeasurementsinthemicroandnanometrerangeapplicationschallengesstateoftheartjanuary12th14th2000semmeringaustria AT seminaronquantitativemicroscopysemmering dimensionalmeasurementsinthemicroandnanometrerange AT hascheklaus dimensionalmeasurementsinthemicroandnanometrerange AT physikalischtechnischebundesanstaltabteilungfertigungsmesstechnik dimensionalmeasurementsinthemicroandnanometrerange |