Photopatterning of thick photoresist layers for MEMS applications:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
2000
|
| Schlagworte: | |
| Beschreibung: | Neuchâtel, Univ., Diss., 2000 |
| Beschreibung: | IV, 120 S. Ill., graph. Darst. |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1804128667957198848 |
|---|---|
| any_adam_object | |
| author | Roth, Sylvain |
| author_facet | Roth, Sylvain |
| author_role | aut |
| author_sort | Roth, Sylvain |
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| building | Verbundindex |
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| format | Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T18:52:54Z |
| institution | BVB |
| language | English |
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| physical | IV, 120 S. Ill., graph. Darst. |
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| spelling | Roth, Sylvain Verfasser aut Photopatterning of thick photoresist layers for MEMS applications by Sylvain Roth 2000 IV, 120 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Neuchâtel, Univ., Diss., 2000 Muster Struktur (DE-588)4768168-8 gnd rswk-swf Photoresist (DE-588)4174545-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Photoresist (DE-588)4174545-0 s Muster Struktur (DE-588)4768168-8 s DE-604 |
| spellingShingle | Roth, Sylvain Photopatterning of thick photoresist layers for MEMS applications Muster Struktur (DE-588)4768168-8 gnd Photoresist (DE-588)4174545-0 gnd |
| subject_GND | (DE-588)4768168-8 (DE-588)4174545-0 (DE-588)4113937-9 |
| title | Photopatterning of thick photoresist layers for MEMS applications |
| title_auth | Photopatterning of thick photoresist layers for MEMS applications |
| title_exact_search | Photopatterning of thick photoresist layers for MEMS applications |
| title_full | Photopatterning of thick photoresist layers for MEMS applications by Sylvain Roth |
| title_fullStr | Photopatterning of thick photoresist layers for MEMS applications by Sylvain Roth |
| title_full_unstemmed | Photopatterning of thick photoresist layers for MEMS applications by Sylvain Roth |
| title_short | Photopatterning of thick photoresist layers for MEMS applications |
| title_sort | photopatterning of thick photoresist layers for mems applications |
| topic | Muster Struktur (DE-588)4768168-8 gnd Photoresist (DE-588)4174545-0 gnd |
| topic_facet | Muster Struktur Photoresist Hochschulschrift |
| work_keys_str_mv | AT rothsylvain photopatterningofthickphotoresistlayersformemsapplications |