Roth, S. (2000). Photopatterning of thick photoresist layers for MEMS applications.
Chicago Style (17th ed.) CitationRoth, Sylvain. Photopatterning of Thick Photoresist Layers for MEMS Applications. 2000.
MLA (9th ed.) CitationRoth, Sylvain. Photopatterning of Thick Photoresist Layers for MEMS Applications. 2000.
Warning: These citations may not always be 100% accurate.