APA (7th ed.) Citation

Roth, S. (2000). Photopatterning of thick photoresist layers for MEMS applications.

Chicago Style (17th ed.) Citation

Roth, Sylvain. Photopatterning of Thick Photoresist Layers for MEMS Applications. 2000.

MLA (9th ed.) Citation

Roth, Sylvain. Photopatterning of Thick Photoresist Layers for MEMS Applications. 2000.

Warning: These citations may not always be 100% accurate.