APA (7th ed.) Citation

(2001). Gate stack and silicide issues in silicon processing: Symposium held April 25 - 27, 2000, San Francisco, California, U.S.A. Materials Research Soc.

Chicago Style (17th ed.) Citation

Gate Stack and Silicide Issues in Silicon Processing: Symposium Held April 25 - 27, 2000, San Francisco, California, U.S.A. Warrendale, Pa: Materials Research Soc, 2001.

MLA (9th ed.) Citation

Gate Stack and Silicide Issues in Silicon Processing: Symposium Held April 25 - 27, 2000, San Francisco, California, U.S.A. Materials Research Soc, 2001.