Microsystem design:
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Bibliographic Details
Main Author: Senturia, Stephen D. 1940- (Author)
Format: Book
Language:English
Published: Boston [u.a.] Kluwer Academic Publ. 2001
Subjects:
Physical Description:XXVI, 689 S. Ill., graph. Darst.
ISBN:0792372468

There is no print copy available.

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