Microelectromechanical systems (MEMS): microscale thermal phenomena in electronic systems ; applications of microfabrication to fluid mechanics ; mechanics in micro-electro-mechanical systems (MEMS) ; micromechanical systems ; presented at The 1996 International Mechanical Engineering Congress and Exposition November 17 - 22, 1996, Atlanta, Georgia
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Bibliographic Details
Format: Conference Proceeding Book
Language:English
Published: New York, N.Y. American Soc. of Mechanical Engineers 1996
Series:DSC / [American Society of Mechanical Engineers / Dynamic Systems and Control Division] 59
Subjects:
Physical Description:VIII, 460 S. Ill., graph. Darst.
ISBN:0791815412

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