Microelectromechanical systems (MEMS) microscale thermal phenomena in electronic systems ; applications of microfabrication to fluid mechanics ; mechanics in micro-electro-mechanical systems (MEMS) ; micromechanical systems ; presented at The 1996 International Mechanical Engineering Congress and Exposition November 17 - 22, 1996, Atlanta, Georgia (American Soc. of Mechanical Engineers, 1996)