Surface science for micro- and nano-device fabrication: [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999]
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Tokyo
Japanese Journal of Applied Physics
2000
|
| Schriftenreihe: | Japanese journal of applied physics / 1
39,7,2 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. eines Zs.-Heftes |
| Beschreibung: | S. 4255 - 4691 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 1999 Tokio |
| id | DE-604.BV013609985 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:48:54Z |
| institution | BVB |
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| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009297426 |
| oclc_num | 633878793 |
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| physical | S. 4255 - 4691 Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Japanese Journal of Applied Physics |
| record_format | marc |
| series2 | Japanese journal of applied physics / 1 |
| spelling | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] ed. by Hajime Asahi... Tokyo Japanese Journal of Applied Physics 2000 S. 4255 - 4691 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics / 1 39,7,2 Einzelaufn. eines Zs.-Heftes Nanostruktur (DE-588)4204530-7 gnd rswk-swf Oberflächenphysik (DE-588)4134881-3 gnd rswk-swf Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Tokio gnd-content Nanostruktur (DE-588)4204530-7 s Oberflächenbehandlung (DE-588)4042908-8 s DE-604 Oberflächenphysik (DE-588)4134881-3 s Asahi, Hajime Sonstige oth International Symposium on Surface Science for Micro- and Nano-Device Fabrication 3 1999 Tokio Sonstige (DE-588)6024613-3 oth |
| spellingShingle | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] Nanostruktur (DE-588)4204530-7 gnd Oberflächenphysik (DE-588)4134881-3 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd |
| subject_GND | (DE-588)4204530-7 (DE-588)4134881-3 (DE-588)4042908-8 (DE-588)1071861417 |
| title | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] |
| title_auth | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] |
| title_exact_search | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] |
| title_full | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] ed. by Hajime Asahi... |
| title_fullStr | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] ed. by Hajime Asahi... |
| title_full_unstemmed | Surface science for micro- and nano-device fabrication [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] ed. by Hajime Asahi... |
| title_short | Surface science for micro- and nano-device fabrication |
| title_sort | surface science for micro and nano device fabrication 3rd international symposium on surface science for micro and nano device fabrication isss 3 tokyo japan november 29 december 1 1999 |
| title_sub | [3rd International Symposium on Surface Science for Micro- and Nano-Device Fabrication (ISSS-3), Tokyo, Japan, November 29 - December 1, 1999] |
| topic | Nanostruktur (DE-588)4204530-7 gnd Oberflächenphysik (DE-588)4134881-3 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd |
| topic_facet | Nanostruktur Oberflächenphysik Oberflächenbehandlung Konferenzschrift 1999 Tokio |
| work_keys_str_mv | AT asahihajime surfacescienceformicroandnanodevicefabrication3rdinternationalsymposiumonsurfacescienceformicroandnanodevicefabricationisss3tokyojapannovember29december11999 AT internationalsymposiumonsurfacescienceformicroandnanodevicefabricationtokio surfacescienceformicroandnanodevicefabrication3rdinternationalsymposiumonsurfacescienceformicroandnanodevicefabricationisss3tokyojapannovember29december11999 |