Micromachining and microfabrication process technology VI: 18 - 20 September 2000, Santa Clara, USA
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
2000
|
| Series: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4174 |
| Subjects: | |
| Physical Description: | X, 524 S. Ill., graph. Darst. |
| ISBN: | 0819438308 |
Staff View
MARC
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Record in the Search Index
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| genre | (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 2000 Santa Clara Calif. |
| id | DE-604.BV013603481 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:48:47Z |
| institution | BVB |
| isbn | 0819438308 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009292681 |
| oclc_num | 45409965 |
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| owner | DE-29T |
| owner_facet | DE-29T |
| physical | X, 524 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. Bellingham, Wash. SPIE 2000 X, 524 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4174 Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Karam, Jean-Michel Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4174 (DE-604)BV000010887 4174 |
| spellingShingle | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)1071861417 |
| title | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA |
| title_auth | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA |
| title_exact_search | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA |
| title_full | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. |
| title_fullStr | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. |
| title_full_unstemmed | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. |
| title_short | Micromachining and microfabrication process technology VI |
| title_sort | micromachining and microfabrication process technology vi 18 20 september 2000 santa clara usa |
| title_sub | 18 - 20 September 2000, Santa Clara, USA |
| topic | Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik Konferenzschrift 2000 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT karamjeanmichel micromachiningandmicrofabricationprocesstechnologyvi1820september2000santaclarausa |