Micromachining and microfabrication process technology VI: 18 - 20 September 2000, Santa Clara, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
2000
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4174 |
| Schlagworte: | |
| Beschreibung: | X, 524 S. Ill., graph. Darst. |
| ISBN: | 0819438308 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV013603481 | ||
| 003 | DE-604 | ||
| 005 | 20030403 | ||
| 007 | t | ||
| 008 | 010223s2000 xxuad|| |||| 10||| eng d | ||
| 020 | |a 0819438308 |9 0-8194-3830-8 | ||
| 035 | |a (OCoLC)45409965 | ||
| 035 | |a (DE-599)BVBBV013603481 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 049 | |a DE-29T | ||
| 050 | 0 | |a TA1505 | |
| 050 | 0 | |a TJ1191.5 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 245 | 1 | 0 | |a Micromachining and microfabrication process technology VI |b 18 - 20 September 2000, Santa Clara, USA |c Jean-Michel Karam ... chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 2000 | |
| 300 | |a X, 524 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 4174 | |
| 650 | 4 | |a Electromechanical devices |x Design and construction |v Congresses | |
| 650 | 4 | |a Microfabrication |v Congresses | |
| 650 | 4 | |a Micromachining |v Congresses | |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2000 |z Santa Clara Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Karam, Jean-Michel |e Sonstige |4 oth | |
| 810 | 2 | |a Society of Photo-Optical Instrumentation Engineers |t Proceedings of SPIE |v 4174 |w (DE-604)BV000010887 |9 4174 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009292681 | ||
Datensatz im Suchindex
| _version_ | 1804128409379405824 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV013603481 |
| callnumber-first | T - Technology |
| callnumber-label | TA1505 |
| callnumber-raw | TA1505 TJ1191.5 |
| callnumber-search | TA1505 TJ1191.5 |
| callnumber-sort | TA 41505 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | ZN 4100 |
| ctrlnum | (OCoLC)45409965 (DE-599)BVBBV013603481 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01566nam a2200421 cb4500</leader><controlfield tag="001">BV013603481</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20030403 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">010223s2000 xxuad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0819438308</subfield><subfield code="9">0-8194-3830-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)45409965</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013603481</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA1505</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ1191.5</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Micromachining and microfabrication process technology VI</subfield><subfield code="b">18 - 20 September 2000, Santa Clara, USA</subfield><subfield code="c">Jean-Michel Karam ... chairs/ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">SPIE</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 524 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers</subfield><subfield code="v">4174</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electromechanical devices</subfield><subfield code="x">Design and construction</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microfabrication</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Micromachining</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2000</subfield><subfield code="z">Santa Clara Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Karam, Jean-Michel</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">Society of Photo-Optical Instrumentation Engineers</subfield><subfield code="t">Proceedings of SPIE</subfield><subfield code="v">4174</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">4174</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009292681</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 2000 Santa Clara Calif. |
| id | DE-604.BV013603481 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:48:47Z |
| institution | BVB |
| isbn | 0819438308 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009292681 |
| oclc_num | 45409965 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | X, 524 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. Bellingham, Wash. SPIE 2000 X, 524 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4174 Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Karam, Jean-Michel Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4174 (DE-604)BV000010887 4174 |
| spellingShingle | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)1071861417 |
| title | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA |
| title_auth | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA |
| title_exact_search | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA |
| title_full | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. |
| title_fullStr | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. |
| title_full_unstemmed | Micromachining and microfabrication process technology VI 18 - 20 September 2000, Santa Clara, USA Jean-Michel Karam ... chairs/ed. |
| title_short | Micromachining and microfabrication process technology VI |
| title_sort | micromachining and microfabrication process technology vi 18 20 september 2000 santa clara usa |
| title_sub | 18 - 20 September 2000, Santa Clara, USA |
| topic | Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Electromechanical devices Design and construction Congresses Microfabrication Congresses Micromachining Congresses Mikrosystemtechnik Konferenzschrift 2000 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT karamjeanmichel micromachiningandmicrofabricationprocesstechnologyvi1820september2000santaclarausa |