Holdings: Heteromikromechanik

Heteromikromechanik:

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Bibliographic Details
Main Author:	Fricke, Klaus (Author)
Format:	Thesis Book
Language:	German
Published:	Aachen Shaker 2000
Series:	Berichte aus der Halbleitertechnik
Subjects:	Hochschulschrift Silicium Mikromechanik Halbleitersubstrat Indiumphosphid Drehratensensor Prozessinnovation
Online Access:	Inhaltsverzeichnis
Physical Description:	XIV, 104 S. Ill., graph. Darst. : 21 cm
ISBN:	3826579097

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MARC


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Record in the Search Index

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discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
format	Thesis Book
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genre_facet	Hochschulschrift
id	DE-604.BV013367328
illustrated	Illustrated
indexdate	2024-07-09T18:44:36Z
institution	BVB
isbn	3826579097
language	German
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-009118184
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owner	DE-703 DE-526 DE-634
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physical	XIV, 104 S. Ill., graph. Darst. : 21 cm
publishDate	2000
publishDateSearch	2000
publishDateSort	2000
publisher	Shaker
record_format	marc
series2	Berichte aus der Halbleitertechnik
spelling	Fricke, Klaus Verfasser aut Heteromikromechanik Klaus Fricke Aachen Shaker 2000 XIV, 104 S. Ill., graph. Darst. : 21 cm txt rdacontent n rdamedia nc rdacarrier Berichte aus der Halbleitertechnik Zugl.: Braunschweig, Techn. Univ., Diss., 2000 Hochschulschrift gtt Silicium (DE-588)4077445-4 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Halbleitersubstrat (DE-588)4158813-7 gnd rswk-swf Indiumphosphid (DE-588)4161535-9 gnd rswk-swf Drehratensensor (DE-588)4602873-0 gnd rswk-swf Prozessinnovation (DE-588)4214088-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Drehratensensor (DE-588)4602873-0 s Mikromechanik (DE-588)4205811-9 s Prozessinnovation (DE-588)4214088-2 s Indiumphosphid (DE-588)4161535-9 s Silicium (DE-588)4077445-4 s Halbleitersubstrat (DE-588)4158813-7 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009118184&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Fricke, Klaus Heteromikromechanik Hochschulschrift gtt Silicium (DE-588)4077445-4 gnd Mikromechanik (DE-588)4205811-9 gnd Halbleitersubstrat (DE-588)4158813-7 gnd Indiumphosphid (DE-588)4161535-9 gnd Drehratensensor (DE-588)4602873-0 gnd Prozessinnovation (DE-588)4214088-2 gnd
subject_GND	(DE-588)4077445-4 (DE-588)4205811-9 (DE-588)4158813-7 (DE-588)4161535-9 (DE-588)4602873-0 (DE-588)4214088-2 (DE-588)4113937-9
title	Heteromikromechanik
title_auth	Heteromikromechanik
title_exact_search	Heteromikromechanik
title_full	Heteromikromechanik Klaus Fricke
title_fullStr	Heteromikromechanik Klaus Fricke
title_full_unstemmed	Heteromikromechanik Klaus Fricke
title_short	Heteromikromechanik
title_sort	heteromikromechanik
topic	Hochschulschrift gtt Silicium (DE-588)4077445-4 gnd Mikromechanik (DE-588)4205811-9 gnd Halbleitersubstrat (DE-588)4158813-7 gnd Indiumphosphid (DE-588)4161535-9 gnd Drehratensensor (DE-588)4602873-0 gnd Prozessinnovation (DE-588)4214088-2 gnd
topic_facet	Hochschulschrift Silicium Mikromechanik Halbleitersubstrat Indiumphosphid Drehratensensor Prozessinnovation
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009118184&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT frickeklaus heteromikromechanik

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