Digital diffractive optics: an introduction to planar diffractive optics and related technology
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Chichester [u.a.]
Wiley
2000
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| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XXIV, 372 S. Ill., graph. Darst. |
| ISBN: | 0471984477 |
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MARC
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| 245 | 1 | 0 | |a Digital diffractive optics |b an introduction to planar diffractive optics and related technology |c B. Kress and P. Meyrueis |
| 264 | 1 | |a Chichester [u.a.] |b Wiley |c 2000 | |
| 300 | |a XXIV, 372 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Diffraction, Réseaux de | |
| 650 | 4 | |a Dispositifs optoélectroniques - Conception et construction | |
| 650 | 4 | |a Holographie | |
| 650 | 4 | |a Électronique numérique | |
| 650 | 4 | |a Équipement électronique miniaturisé - Conception et construction | |
| 650 | 4 | |a Diffraction gratings | |
| 650 | 4 | |a Digital electronics | |
| 650 | 4 | |a Holography | |
| 650 | 4 | |a Miniature electronic equipment |x Design and construction | |
| 650 | 4 | |a Optoelectronic devices |x Design and construction | |
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Record in the Search Index
| _version_ | 1804128110009909248 |
|---|---|
| adam_text | DIGITAL DIFFRACTIVE OPTICS AN INTRODUCTION TO PLANAR DIFFRACTIVE OPTICS
AND RELATED TECHNOLOGY B. KRESS AND P. MEYRUEIS LOUIS PASTEUR
UNIVERSITY, STRASBOURG, FRANCE AND DIFFRACTIVE SOLUTIONS, NEUBOURG,
FRANCE JOHN WILEY & SONS, LTD CHICHESTER * NEW YORK * WEINHEIM *
BRISBANE * SINGAPORE * TORONTO CONTENTS PREFACE XV ACKNOWLEDGMENTS XVIII
ACRONYMS XIX INDUSTRIAL PROPERTY XXIII INTRODUCTION: FROM DIFFRACTION TO
DIFFRACTIVE OPTICS 1 1 INTRODUCTION 1 2 HUYGENS-FRESNEL DIFFRACTION 4 3
FRAUNHOFER AND FRESNEL DIFFRACTION 5 4 EXAMPLES OF FAR-FIELD DIFFRACTION
PATTERNS 8 4.1 LONG, NARROW SLIT EXAMPLE 8 4.2 DOUBLE SLIT EXAMPLE 10
4.3 DIFFRACTION GRATING 11 4.4 FRAUNHOFER DIFFRACTION FOR A RECTANGULAR
APERTURE 13 4.5 FRAUNHOFER DIFFRACTION FOR A CIRCULAR APERTURE 14 5
CONCLUSION 15 CHAPTER 1 DESIGN AND SIMULATION OF DIFFRACTIVE OPTICAL
ELEMENTS 17 1 INTRODUCTION 17 2 DIFFRACTION MODELLING OF DOES:
THEORETICAL BACKGROUND 17 2.1 DIFFRACTION OF MONOCHROMATIC WAVES 17
2.1.1 REVIEW OF SCALAR DIFFRACTION THEORY FOR DOE MODELLING 18
LIMITATIONS OF THE KIRCHHOFF MODEL 22 2.1.2 REVIEW OF RIGOROUS
DIFFRACTION MODELS 24 GRATING DESCRIPTION 26 LORD RAYLEIGH S EARLY
PROPOSITIONS 27 INTEGRAL METHOD 27 DIFFERENTIAL METHOD 28 VI CONTENTS
MODAL APPROACH 30 RIGOROUS COUPLED WAVE ANALYSIS APPROACH 30 TWO-WAVE
THEORY 31 RAMAN-NATH S METHOD 31 KOGELNIK S METHOD 31 ANALYTICAL METHODS
31 RYTOV S METHOD 32 EFFECTIVE MEDIUM THEORY (EMT) 32 FARN S METHOD 32
2.1.3 REVIEW OF INTERMEDIATE DIFFRACTION MODELS 34 OPTIMUM ETCH DEPTH 35
GEOMETRICAL SHADOW DUTY CYCLE 36 2.2 THEORETICAL ASPECTS OF DOE
PERFORMANCE IN THE PARAXIAL DOMAIN 37 2.2.1 ENERGETIC CONSIDERATIONS OF
SCALAR DIFFRACTION 37 DIFFRACTION EFFICIENCY FOR AMPLITUDE DOES 38
DIFFRACTION EFFICIENCY FOR MULTILEVEL SURFACE RELIEF DOES 39 DIFFRACTION
EFFICIENCY FOR ANALOG SURFACE RELIEF DOES 42 2.2.2 GEOMETRIC
CONSIDERATIONS OF SCALAR DIFFRACTION .... 46 2.2.3 PHYSICAL DOE LAYOUT
CONSIDERATIONS FOR DIFFRACTION EFFICIENCY 49 3 NUMERICAL IMPLEMENTATION
TECHNIQUES 50 3.1 NUMERICAL IMPLEMENTATION OF SCALAR THEORY 50 3.1.1
OBJECT SAMPLING CONSIDERATIONS 51 3.1.2 FINITE PIXEL SIZE CONSIDERATIONS
52 3.1.3 FROM THE DFT TO THE FFT ALGORITHM 56 3.1.4 CPU TIME
CONSIDERATIONS 56 3.2 NUMERICAL IMPLEMENTATION OF RIGOROUS DIFFRACTION
THEORIES . 57 3.2.1 NUMERICAL RCWA RESOLUTION METHOD 58 MODELLING OF A
PERIODIC PROFILE OF INFINITE EXTENT. . 58 GLOBAL WAVEFRONT COUPLING 58
FIELD DESCRIPTION OUTSIDE THE DIFFRACTIVE STRUCTURE REGION 59 RESOLUTION
OF THE WAVE EQUATION 59 MATRIX REPRESENTATION OF THE WAVE EQUATION ....
60 APPROXIMATIONS OF THE RCWA METHOD 60 3.2.2 DISCUSSION ON THE COUPLED
WAVE APPROXIMATIONS ... 61 3.2.3 CPU TIME CONSIDERATIONS 62 4 DOE DESIGN
AND OPTIMIZATION TECHNIQUES 62 4.1 ANALYTICAL-TYPE DIFFRACTIVE ELEMENTS
63 4.1.1 STRAIGHTFORWARD DESIGN 63 CONTENTS VII 4.1.2 USE OF CLASSICAL
OPTICAL DESIGN (COD) TOOLS 66 RADIALLY SYMMETRICAL PHASE PROFILES FOR
ASPHERICAL PHASE PROFILE DESCRIPTION (THE WELL-KNOWN SAG EQUATION) 68
GENERAL NON-SYMMETRICAL ASPHERICAL PHASE PROFILE DESCRIBED AS A
POLYNOMIAL EXPANSION (I.E. CODEV* OUTPUT FORMAT) 68 4.1.3
INTERFEROGRAM-TYPE DOES 69 4.1.4 HARMONIC OR MULTIORDER DOES 72 4.1.5
HOLOGRAPHIC OPTICAL ELEMENTS (HOES) 74 4.2 NUMERICAL-TYPE DIFFRACTIVE
ELEMENTS 75 4.2.1 CHARACTERISTICS OF NUMERICAL-TYPE DOES 76 DEGREES OF
FREEDOM OF DESIGN PROCESS 76 DOE-RELATED DEGREES OF FREEDOM 76
RECONSTRUCTION PLANE-RELATED DEGREES OF FREEDOM . 76 4.2.2 QUALITY
CRITERIA OF RECONSTRUCTION 77 DIFFRACTION EFFICIENCY R)& 77 ROOT MEAN
SQUARE ERROR (RMS-E) 78 SIGNAL-TO-NOISE RATIO (SNR) 79 STREHL RATIO * 80
COST FUNCTION CONSIDERATIONS 80 SPACE-BANDWIDTH PRODUCT (SBWP) 81
IMPLICIT DESIGN CONSTRAINT CONSIDERATIONS 83 4.2.3 DIRECT DESIGN
TECHNIQUES 83 TALBOT ARRAY ILLUMINATORS 84 4.2.4 ITERATIVE OPTIMIZATION
ALGORITHMS 86 4.2.5 INPUT-OUTPUT OPTIMIZATION ALGORITHMS 87 DIRECT
BINARY SEARCH ALGORITHM 87 SIMULATED ANNEALING (SA) ALGORITHMS 87
ITERATIVE DISCRETE ON-AXIS (IDO) ALGORITHM 90 4.2.6 IFTA OPTIMIZATION
ALGORITHMS 90 GERCHBERG-SAXTON ALGORITHM 90 PING-PONG ALGORITHM 92
YANG-GU ALGORITHM 93 4.2.7 ALGORITHMS BASED ON EVOLUTIONARY PROGRAMMING
... 95 GENETIC ALGORITHMS 97 4.2.8 GLOBAL OPTIMIZATION ALGORITHMS 97 4.3
MULTIFUNCTIONAL DOES: DESCRIPTION AND CLASSIFICATION 98 4.3.1 NON-LINEAR
QUANTIZATION 100 4.4 ENCODING TECHNIQUES 101 4.4.1 DOE DATA QUANTIZATION
PROCESS 101 4.4.2 FRINGE-ORIENTED ENCODING 104 4.4.3 CELL-ORIENTED
ENCODING 104 VUL CONTENTS AAA PIXEL-ORIENTED ENCODING 106 COMPLEX
KINOFORM ENCODING METHOD 106 REAL ERROR DIFFUSION ENCODING METHOD 107
COMPLEX ERROR DIFFUSION ENCODING METHOD 109 LOHMAN ENCODING METHOD ILL
LEE ENCODING METHOD ILL BURCH ENCODING METHOD 113 4.4.5 SPATIAL CARRIER
ENCODING 113 HIGH SPATIAL FREQUENCY CARRIER 113 GRATING DISLOCATION
ENCODING 114 4.4.6 ENCODING ADVANTAGES AND LIMITATIONS 115 5 DOE
MODELLING AND SIMULATION TECHNIQUES 118 5.1 ANALYTICAL-TYPE DOE
MODELLING AND SIMULATION TECHNIQUES 118 5.1.1 LOCAL GRATING
APPROXIMATION 119 5.1.2 EQUIVALENT LENS MODEL 120 5.1.3 SWEATT MODEL 121
5.1.4 USER-DEFINED SURFACES (UDS) 121 5.1.5 HOE SIMULATION METHOD 122
5.2 NUMERICAL-TYPE DOE MODELLING AND SIMULATION TECHNIQUES 122 5.3 BPM
MODELLING TECHNIQUES 123 5.3.1 ** POLARIZATION MODE 124 5.3.2 TM
POLARIZATION MODE 124 6 REFERENCES 125 CHAPTER 2 DOE FABRICATION AND
REPLICATION TECHNIQUES 130 1 INTRODUCTION 130 2 DESKTOP DOE PRODUCTION
TECHNIQUES 131 2.1 PHOTOREDUCTION TECHNIQUE 131 2.2 DIRECT
HIGH-RESOLUTION PRINTING 132 3 DIAMOND MACHINE TOOLS 132 4 DYNAMICAL
DEVICES 133 4.1 RECONFIGURABLE DOES 134 4.1.1 ACOUSTO-OPTICAL MODULATORS
134 4.1.2 ELECTRO-OPTICAL MODULATORS 134 4.1.3 PHOTOREFRACTIVE MATERIALS
135 4.1.4 LIQUID CRYSTAL SPATIAL LIGHT MODULATORS 135 4.1.5 MEMS-BASED
RECONFIGURABLE DOES 136 4.2 SWITCHABLE DOES 137 5 MICROLITHOGRAPHIC
FABRICATION TECHNOLOGY 138 5.1 MASK PATTERN GENERATORS 139 5.1.1
LASER-BEAM WRITING MACHINES 139 CONTENTS IX 5.1.2 ELECTRON-BEAM PATTERN
GENERATORS 139 5.2 PHOTOLITHOGRAPHIC TRANSFER 141 5.2.1 MASK ALIGNERS
141 5.2.2 PHASE SHIFT MASKS 142 5.2.3 STEP AND SCAN: STEPPERS 143 5.3
PATTERN ETCHING 144 5.4 DEEP EXPOSURE LITHOGRAPHY 144 5.4.1 DEEP X-RAY
EXPOSURE AND PATTERNING 145 5.4.2 DEEP PROTON IRRADIATION 146 5.5 DIRECT
MATERIAL ABLATION TOOLS 147 5.5.1 FIB TECHNOLOGY 148 5.5.2 DIRECT LASER
ABLATION 148 5.5.3 FAST ATOM-BEAM MASKING 149 6 MICROLITHOGRAPHIC
FABRICATION TECHNIQUES 150 6.1 OPTICAL INTERFERENCE 150 6.1.1 FIBER
BRAGG GRATING FABRICATION 150 6.2 CONVENTIONAL MASK ALIGNMENTS 152 6.3
GREY-TONE MASKING 152 6.4 DIRECT WRITE METHODS 157 6.4.1 DIRECT BINARY
WRITE 158 6.4.2 DIRECT ANALOG WRITE 158 6.5 ION EXCHANGE TECHNIQUES 160
6.5.1 ION EXCHANGE FABRICATION METHODS 160 6.6 LIGA PROCESS 161 7
REPLICATION TECHNIQUES 161 7.1 USE OF STEP AND REPEAT (STEPPER) 162 7.2
PLASTIC EMBOSSING PROCESS 162 7.3 MOULDING PROCESSES 162 7.3.1 INJECTION
MOULDING DOE REPLICATION TECHNIQUES . . . 162 7.4 SOL-GEL PROCESS 165
7.5 HOLOGRAPHIC RECORDING PROCESS 165 8 SUMMARY OF DOE DESIGN AND
FABRICATION 169 9 REFERENCES 169 CHAPTER 3 CAD/*** TOOLS FOR DOES 171 1
INTRODUCTION 171 2 CAD DESIGN TECHNIQUES 171 2.1 GENERAL DESIGN
ALGORITHM FOR CGHS 171 2.1.1 CHOICE OF THE CORE PROPAGATOR 172 2.1.2
IMPROVEMENTS TO THE CORE ALGORITHM 176 IMPROVEMENTS OF THE QUANTIZATION
PROCESS 176 IMPROVEMENTS IN UNIFORMITY 180 2.2 OPTIMUM ENCODING METHODS
182 X CONTENTS 2.3 CAD SIMULATION TECHNIQUES 185 2.3.1 NUMERICAL
PROPAGATOR CONSTRAINTS 186 FAR-FIELD RECONSTRUCTIONS 186 NEAR-FIELD
RECONSTRUCTIONS 186 STRAIGHTFORWARD FRESNEL TRANSFORM (SFFT) PROPAGATOR
187 CONVOLUTION-BASED FRESNEL TRANSFORM (CBFT) PROPAGATOR 188 THE
KIRCHHOFF-BASED 3D PROPAGATORS 189 3DK-BASED DOE DESIGN AND OPTIMIZATION
192 2.4 INCREASING THE DYNAMIC RANGE OF THE FFT-BASED RECONSTRUCTIONS
194 2.4.1 IMBEDDING PROCESS 195 2.4.2 OVERSAMPLING PROCESS 195 2.4.3
EFFECTS OF COMBINED PROCESSES 195 2.4.4 EXAMPLE OF NUMERICAL
RECONSTRUCTION IMPROVEMENTS 197 2.4.5 SPATIAL MULTIPLEXING PROCESS 198 3
HIGH-LEVEL DOE OPERATIONS IN CAD/*** TOOLS 201 3.1 SPATIAL MULTIPLEXING
201 3.2 DOE DATA MODULATION 202 3.3 COMPLEX DOE DATA MULTIPLEXING 205
3.4 ITERATIVE DOE DATA MULTIPLEXING 208 3.4.1 SOLUTIONS TO SCALING
PROBLEM 209 3.4.2 ADAPTED CONSTRAINT SETS FOR CONVERGENCE OF ALGORITHM
211 4 ASSOCIATED TOLERANCING: DESIGN RULE CHECKS 212 5 REFERENCES 214
CHAPTER 4 DOE FABRICATION TOLERANCING ANALYSIS 215 1 INTRODUCTION 215 2
OPTIMUM MICROLITHOGRAPHIC FABRICATION TECHNIQUES 215 2.1 BASIC
REQUIREMENTS 216 2.2 EXPERIMENTAL INVESTIGATIONS 216 2.2.1 DIRECT BINARY
ELECTRON-BEAM WRITE 218 EXPERIMENTAL VALIDATIONS 218 FABRICATION ERROR
ANALYSIS 220 2.2.2 DIRECT ANALOG ELECTRON-BEAM WRITE 221 EXPERIMENTAL
VALIDATIONS 221 FABRICATION ERROR ANALYSIS 224 3 FABRICATION CONSTRAINT
ANALYSIS AND MODELLING 227 3.1 ELECTRON-BEAM PROXIMITY EFFECTS 228 3.1.1
2D-EPE EFFECTS 230 CONTENTS XI 3.1.2 3D *** EFFECTS 232 3.2 OPTICAL
PROXIMITY EFFECTS 236 3.2.1 QUANTIFICATION OF THE EFFECTS OF 2D OPES ON
DOE PERFORMANCE 237 3.3 ANISOTROPIC ETCHING 240 3.3.1 QUANTIFICATION OF
THE EFFECTS OF ANISOTROPIC RIBE ETCHING ON THE DOE PERFORMANCES 241
3.3.2 ADDITIONAL RIBE ETCHING CONSTRAINTS AND ERRORS .... 244 3.4 OTHER
SYSTEMATIC FABRICATION ERRORS 244 4 FABRICATION TOLERANCING METHODS 247
5 SYSTEMATIC FABRICATION ERROR COMPENSATION METHODS 250 5.1 SYSTEMATIC
FABRICATION ERROR COMPENSATION TECHNIQUES .... 251 5.1.1 ELECTRON-BEAM
PROXIMITY COMPENSATION ALGORITHMS . 252 ANALYTICAL-TYPE DOE EPE
COMPENSATION 253 NUMERICAL-TYPE DOE EPE COMPENSATION 256 APPLICATION TO
2D EPE EFFECTS 258 ANALYTICAL-TYPE DOE COMPENSATION 258 NUMERICAL-TYPE
DOE COMPENSATION 258 APPLICATION TO 3D EPE EFFECTS 260 ANALYTICAL-TYPE
DOE COMPENSATION 260 NUMERICAL-TYPE DOE COMPENSATION 261 5.1.2 OPTICAL
PROXIMITY COMPENSATION ALGORITHMS 265 5.1.3 COMPENSATION OF OTHER
FABRICATION ERRORS 266 5.1.4 DIRECT LINEAR COMPENSATION METHODS 267
ELECTRON-BEAM DOSAGE 267 ANISOTROPIC ION MILLING ERRORS 268 5.2
DECREASING DOE SENSITIVITY TO FABRICATION ERRORS 268 5.2.1 NUMERICAL
PROPAGATOR CORE ALTERATION 268 5.2.2 MULTIPLE IFTA-BASED ITERATIVE
COMPENSATION 269 5.2.3 MULTIPLE PI QUANTIZATION TECHNIQUES 270 6
REFERENCES 273 CHAPTER 5 DOE MASK LAYOUT GENERATION 275 1 INTRODUCTION
275 2 STANDARD FABRICATION FILE FORMATS 275 2.1 HIGH LEVEL FORMATS 276
2.2 INTERMEDIATE-LEVEL FORMATS 276 2.3 SOURCE LANGUAGES 276 2.4
LOW-LEVEL FORMATS 277 3 DOE DATA FRACTURE TECHNIQUES 280 3.1
ANALYTICAL-TYPE DOE FRACTURE 280 3.1.1 CORE ALGORITHM OF THE
GENERAL-PURPOSE FRACTURE PROCESS 282 XLL CONTENTS 3.1.2 FRACTURE ERROR
QUANTIFICATION 289 3.1.3 FRINGE SEARCH ALGORITHM 290 3.1.4
POLYGONIZATION OF SKELETONIZED FRINGES 291 3.2 NUMERICAL-TYPE DOE
FRACTURE 293 3.2.1 FINDING THE OPTIMUM KINOFORM CELL SHAPE 293 3.2.2
DATA COMPRESSION APPLIED TO THE FINAL FABRICATION FILE 296 DATA
COMPRESSION METHOD NO. 1 296 DATA COMPRESSION METHOD NO. 2 297 3.3
SIMULATION OF EFFECTS OF DOE DATA FRACTURE 298 3.4 FINAL FORMATTING OF
THE FRACTURED PATTERNS 300 3.5 RETICULE LAYOUT PLACEMENT AND WAFER
STEPPING 302 CHAPTER 6 SYSTEM-ORIENTED DOE DESIGNS: EXAMPLES 307 1
INTRODUCTION 307 2 HYBRID OPTICAL SYSTEMS 309 2.1 DIFFRACTIVE/REFRACTIVE
PARTITIONING ISSUES 310 2.2 SIMULATION TECHNIQUES FOR HYBRID SYSTEMS 312
2.2.1 DOE PHASE UNWRAPPING PROCESS 313 2.2.2 HYBRID RAY TRACING/FRESNEL
PROPAGATION METHOD ... 313 EXAMPLE 318 3 ADDITIONAL PROPERTIES OF HYBRID
LENSES 320 3.1 SHALLOW BLAZED DIFFRACTIVE GROOVES 321 3.2 DEEP BLAZED
DIFFRACTIVE GROOVES 323 3.3 BINARY DIFFRACTIVE GROOVES 324 3.4
MULTIPLEXED DIFFRACTIVE GROOVES 326 4 OPTOELECTRONIC SYSTEMS 326 4.1 OE
PARTITIONING ISSUES 328 4.2 EXAMPLE 1: OPTICAL CLOCK DISTRIBUTION FOR
MCM 330 4.2.1 PHYSICAL PARAMETER OPTIMIZATION 332 4.2.2 RELATED
CONSTRAINTS 334 4.2.3 OE SYSTEM ARCHITECTURE OPTIMIZATION PROCEDURE . .
. 336 4.2.4 MULTIFUNCTIONAL DOE OPTIMIZATION PROCEDURE 338 4.3 EXAMPLE
2: FREE-SPACE OPTICAL INTERCONNECTIONS 342 4.3.1 COMPUTER
INTERCONNECTION ARCHITECTURE 342 4.3.2 PHYSICAL DETECTOR PLACEMENTS 343
4.3.3 DOE ARRAY DESIGN CONSIDERATIONS 344 4.4 EXAMPLE 3: OE PACKAGING
ISSUES * DESIGN COMPENSATIONS . 347 4.4.1 OE PACKAGING TOLERANCING 347
4.4.2 DOE COMPENSATION TECHNIQUES 349 CORE PROPAGATOR ALTERATION 350 USE
OF THE MP-GPA ALGORITHM 352 CONTENTS XIII 5 OPTOMECHANICAL SYSTEMS 353
5.1 OPTOMECHANICAL PARTITIONING ISSUES 353 5.2 EXAMPLE 1: DIFFRACTIVE
SYNTHETIC APERTURE ZOOM 354 5.3 EXAMPLE 2: MICROFLUIDIC SYSTEM 358 5.4
EXAMPLE 3: HIGH-RESOLUTION LIDAR SIGNAL ANALYSIS MICROSYSTEM 361 6
SUMMARY 363 7 REFERENCES 363 CONCLUSION 367 INDEX 369
|
| any_adam_object | 1 |
| author | Kress, Bernard Meyrueis, Patrick |
| author_facet | Kress, Bernard Meyrueis, Patrick |
| author_role | aut aut |
| author_sort | Kress, Bernard |
| author_variant | b k bk p m pm |
| building | Verbundindex |
| bvnumber | BV013336078 |
| callnumber-first | T - Technology |
| callnumber-label | TA1750 |
| callnumber-raw | TA1750 |
| callnumber-search | TA1750 |
| callnumber-sort | TA 41750 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UH 5200 |
| ctrlnum | (OCoLC)42682982 (DE-599)BVBBV013336078 |
| dewey-full | 621.381/045 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/045 |
| dewey-search | 621.381/045 |
| dewey-sort | 3621.381 245 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV013336078 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:44:01Z |
| institution | BVB |
| isbn | 0471984477 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009094347 |
| oclc_num | 42682982 |
| open_access_boolean | |
| owner | DE-703 DE-522 DE-634 DE-11 |
| owner_facet | DE-703 DE-522 DE-634 DE-11 |
| physical | XXIV, 372 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Wiley |
| record_format | marc |
| spelling | Kress, Bernard Verfasser aut Digital diffractive optics an introduction to planar diffractive optics and related technology B. Kress and P. Meyrueis Chichester [u.a.] Wiley 2000 XXIV, 372 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffraction, Réseaux de Dispositifs optoélectroniques - Conception et construction Holographie Électronique numérique Équipement électronique miniaturisé - Conception et construction Diffraction gratings Digital electronics Holography Miniature electronic equipment Design and construction Optoelectronic devices Design and construction Diffraktives optisches Element (DE-588)4603135-2 gnd rswk-swf Diffraktives optisches Element (DE-588)4603135-2 s DE-604 Meyrueis, Patrick Verfasser aut GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009094347&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Kress, Bernard Meyrueis, Patrick Digital diffractive optics an introduction to planar diffractive optics and related technology Diffraction, Réseaux de Dispositifs optoélectroniques - Conception et construction Holographie Électronique numérique Équipement électronique miniaturisé - Conception et construction Diffraction gratings Digital electronics Holography Miniature electronic equipment Design and construction Optoelectronic devices Design and construction Diffraktives optisches Element (DE-588)4603135-2 gnd |
| subject_GND | (DE-588)4603135-2 |
| title | Digital diffractive optics an introduction to planar diffractive optics and related technology |
| title_auth | Digital diffractive optics an introduction to planar diffractive optics and related technology |
| title_exact_search | Digital diffractive optics an introduction to planar diffractive optics and related technology |
| title_full | Digital diffractive optics an introduction to planar diffractive optics and related technology B. Kress and P. Meyrueis |
| title_fullStr | Digital diffractive optics an introduction to planar diffractive optics and related technology B. Kress and P. Meyrueis |
| title_full_unstemmed | Digital diffractive optics an introduction to planar diffractive optics and related technology B. Kress and P. Meyrueis |
| title_short | Digital diffractive optics |
| title_sort | digital diffractive optics an introduction to planar diffractive optics and related technology |
| title_sub | an introduction to planar diffractive optics and related technology |
| topic | Diffraction, Réseaux de Dispositifs optoélectroniques - Conception et construction Holographie Électronique numérique Équipement électronique miniaturisé - Conception et construction Diffraction gratings Digital electronics Holography Miniature electronic equipment Design and construction Optoelectronic devices Design and construction Diffraktives optisches Element (DE-588)4603135-2 gnd |
| topic_facet | Diffraction, Réseaux de Dispositifs optoélectroniques - Conception et construction Holographie Électronique numérique Équipement électronique miniaturisé - Conception et construction Diffraction gratings Digital electronics Holography Miniature electronic equipment Design and construction Optoelectronic devices Design and construction Diffraktives optisches Element |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009094347&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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