Holdings: An industrial CMOS process family for integrated silicon sensors

An industrial CMOS process family for integrated silicon sensors:

Saved in:

Bibliographic Details
Main Author:	Müller, Thomas 1965- (Author)
Format:	Microfilm Book
Language:	English German
Published:	1999
Edition:	[Mikrofiche-Ausg.]
Subjects:	Integrierter Sensor CMOS-Schaltung Nassätzen Siliciumsensor CMOS Sensor Ätzen Siliciumbauelement Hochschulschrift
Item Description:	Zürich, Techn. Hochsch., Diss., 1999. - Zsfassung in engl. und dt. Sprache
Physical Description:	II, 125 S. Ill., graph. Darst.

Staff View

MARC


LEADER	00000nam a2200000 c 4500
001	BV013282969
003	DE-604
005	20021209
007	he\|uuuuuuuuuu
008	000802s1999 ad\|\| bm\|\|\| 00\|\|\| eng d
035			\|a (OCoLC)632997390
035			\|a (DE-599)BVBBV013282969
040			\|a DE-604 \|b ger \|e rakwb
041	0		\|a eng \|a ger
049			\|a DE-91 \|a DE-29T \|a DE-355
084			\|a ELT 285d \|2 stub
100	1		\|a Müller, Thomas \|d 1965- \|e Verfasser \|0 (DE-588)12208439X \|4 aut
245	1	0	\|a An industrial CMOS process family for integrated silicon sensors \|c by Thomas Müller
250			\|a [Mikrofiche-Ausg.]
264		1	\|c 1999
300			\|a II, 125 S. \|b Ill., graph. Darst.
336			\|b txt \|2 rdacontent
337			\|b h \|2 rdamedia
338			\|b he \|2 rdacarrier
500			\|a Zürich, Techn. Hochsch., Diss., 1999. - Zsfassung in engl. und dt. Sprache
533			\|a Mikroform-Ausgabe \|n Mikrofiche-Ausg.: \|e 2 Mikrofiches : 24x
650	0	7	\|a Integrierter Sensor \|0 (DE-588)4235815-2 \|2 gnd \|9 rswk-swf
650	0	7	\|a CMOS-Schaltung \|0 (DE-588)4148111-2 \|2 gnd \|9 rswk-swf
650	0	7	\|a Nassätzen \|0 (DE-588)4332374-1 \|2 gnd \|9 rswk-swf
650	0	7	\|a Siliciumsensor \|0 (DE-588)4193160-9 \|2 gnd \|9 rswk-swf
650	0	7	\|a CMOS \|0 (DE-588)4010319-5 \|2 gnd \|9 rswk-swf
650	0	7	\|a Sensor \|0 (DE-588)4038824-4 \|2 gnd \|9 rswk-swf
650	0	7	\|a Ätzen \|0 (DE-588)4000648-7 \|2 gnd \|9 rswk-swf
650	0	7	\|a Siliciumbauelement \|0 (DE-588)4181368-6 \|2 gnd \|9 rswk-swf
655		7	\|0 (DE-588)4113937-9 \|a Hochschulschrift \|2 gnd-content
689	0	0	\|a Integrierter Sensor \|0 (DE-588)4235815-2 \|D s
689	0	1	\|a Siliciumsensor \|0 (DE-588)4193160-9 \|D s
689	0	2	\|a CMOS \|0 (DE-588)4010319-5 \|D s
689	0	3	\|a Nassätzen \|0 (DE-588)4332374-1 \|D s
689	0		\|5 DE-604
689	1	0	\|a Sensor \|0 (DE-588)4038824-4 \|D s
689	1		\|8 1\p \|5 DE-604
689	2	0	\|a CMOS-Schaltung \|0 (DE-588)4148111-2 \|D s
689	2		\|8 2\p \|5 DE-604
689	3	0	\|a Siliciumbauelement \|0 (DE-588)4181368-6 \|D s
689	3		\|8 3\p \|5 DE-604
689	4	0	\|a Ätzen \|0 (DE-588)4000648-7 \|D s
689	4		\|8 4\p \|5 DE-604
776	0	8	\|i Reproduktion von \|a Müller, Thomas, 1965- \|t An industrial CMOS process family for integrated silicon sensors \|d 1999
999			\|a oai:aleph.bib-bvb.de:BVB01-009055265
883	1		\|8 1\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk
883	1		\|8 2\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk
883	1		\|8 3\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk
883	1		\|8 4\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk

Record in the Search Index

_version_	1804128049672749056
any_adam_object
author	Müller, Thomas 1965-
author_GND	(DE-588)12208439X
author_facet	Müller, Thomas 1965-
author_role	aut
author_sort	Müller, Thomas 1965-
author_variant	t m tm
building	Verbundindex
bvnumber	BV013282969
classification_tum	ELT 285d
ctrlnum	(OCoLC)632997390 (DE-599)BVBBV013282969
discipline	Elektrotechnik
edition	[Mikrofiche-Ausg.]
format	Microfilm Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02549nam a2200613 c 4500</leader><controlfield tag="001">BV013282969</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20021209 </controlfield><controlfield tag="007">he\|uuuuuuuuuu</controlfield><controlfield tag="008">000802s1999 ad\|\| bm\|\|\| 00\|\|\| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)632997390</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013282969</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield><subfield code="a">ger</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-355</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 285d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Müller, Thomas</subfield><subfield code="d">1965-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)12208439X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">An industrial CMOS process family for integrated silicon sensors</subfield><subfield code="c">by Thomas Müller</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">[Mikrofiche-Ausg.]</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">II, 125 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">h</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">he</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zürich, Techn. Hochsch., Diss., 1999. - Zsfassung in engl. und dt. Sprache</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Mikroform-Ausgabe</subfield><subfield code="n">Mikrofiche-Ausg.:</subfield><subfield code="e">2 Mikrofiches : 24x</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Integrierter Sensor</subfield><subfield code="0">(DE-588)4235815-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS-Schaltung</subfield><subfield code="0">(DE-588)4148111-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nassätzen</subfield><subfield code="0">(DE-588)4332374-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumsensor</subfield><subfield code="0">(DE-588)4193160-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sensor</subfield><subfield code="0">(DE-588)4038824-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Integrierter Sensor</subfield><subfield code="0">(DE-588)4235815-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Siliciumsensor</subfield><subfield code="0">(DE-588)4193160-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Nassätzen</subfield><subfield code="0">(DE-588)4332374-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Sensor</subfield><subfield code="0">(DE-588)4038824-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">CMOS-Schaltung</subfield><subfield code="0">(DE-588)4148111-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Siliciumbauelement</subfield><subfield code="0">(DE-588)4181368-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="8">3\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="8">4\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Reproduktion von</subfield><subfield code="a">Müller, Thomas, 1965-</subfield><subfield code="t">An industrial CMOS process family for integrated silicon sensors</subfield><subfield code="d">1999</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009055265</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">3\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">4\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection>
genre	(DE-588)4113937-9 Hochschulschrift gnd-content
genre_facet	Hochschulschrift
id	DE-604.BV013282969
illustrated	Illustrated
indexdate	2024-07-09T18:43:04Z
institution	BVB
language	English German
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-009055265
oclc_num	632997390
open_access_boolean
owner	DE-91 DE-BY-TUM DE-29T DE-355 DE-BY-UBR
owner_facet	DE-91 DE-BY-TUM DE-29T DE-355 DE-BY-UBR
physical	II, 125 S. Ill., graph. Darst.
publishDate	1999
publishDateSearch	1999
publishDateSort	1999
record_format	marc
spelling	Müller, Thomas 1965- Verfasser (DE-588)12208439X aut An industrial CMOS process family for integrated silicon sensors by Thomas Müller [Mikrofiche-Ausg.] 1999 II, 125 S. Ill., graph. Darst. txt rdacontent h rdamedia he rdacarrier Zürich, Techn. Hochsch., Diss., 1999. - Zsfassung in engl. und dt. Sprache Mikroform-Ausgabe Mikrofiche-Ausg.: 2 Mikrofiches : 24x Integrierter Sensor (DE-588)4235815-2 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf Nassätzen (DE-588)4332374-1 gnd rswk-swf Siliciumsensor (DE-588)4193160-9 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Integrierter Sensor (DE-588)4235815-2 s Siliciumsensor (DE-588)4193160-9 s CMOS (DE-588)4010319-5 s Nassätzen (DE-588)4332374-1 s DE-604 Sensor (DE-588)4038824-4 s 1\p DE-604 CMOS-Schaltung (DE-588)4148111-2 s 2\p DE-604 Siliciumbauelement (DE-588)4181368-6 s 3\p DE-604 Ätzen (DE-588)4000648-7 s 4\p DE-604 Reproduktion von Müller, Thomas, 1965- An industrial CMOS process family for integrated silicon sensors 1999 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Müller, Thomas 1965- An industrial CMOS process family for integrated silicon sensors Integrierter Sensor (DE-588)4235815-2 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Nassätzen (DE-588)4332374-1 gnd Siliciumsensor (DE-588)4193160-9 gnd CMOS (DE-588)4010319-5 gnd Sensor (DE-588)4038824-4 gnd Ätzen (DE-588)4000648-7 gnd Siliciumbauelement (DE-588)4181368-6 gnd
subject_GND	(DE-588)4235815-2 (DE-588)4148111-2 (DE-588)4332374-1 (DE-588)4193160-9 (DE-588)4010319-5 (DE-588)4038824-4 (DE-588)4000648-7 (DE-588)4181368-6 (DE-588)4113937-9
title	An industrial CMOS process family for integrated silicon sensors
title_auth	An industrial CMOS process family for integrated silicon sensors
title_exact_search	An industrial CMOS process family for integrated silicon sensors
title_full	An industrial CMOS process family for integrated silicon sensors by Thomas Müller
title_fullStr	An industrial CMOS process family for integrated silicon sensors by Thomas Müller
title_full_unstemmed	An industrial CMOS process family for integrated silicon sensors by Thomas Müller
title_short	An industrial CMOS process family for integrated silicon sensors
title_sort	an industrial cmos process family for integrated silicon sensors
topic	Integrierter Sensor (DE-588)4235815-2 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Nassätzen (DE-588)4332374-1 gnd Siliciumsensor (DE-588)4193160-9 gnd CMOS (DE-588)4010319-5 gnd Sensor (DE-588)4038824-4 gnd Ätzen (DE-588)4000648-7 gnd Siliciumbauelement (DE-588)4181368-6 gnd
topic_facet	Integrierter Sensor CMOS-Schaltung Nassätzen Siliciumsensor CMOS Sensor Ätzen Siliciumbauelement Hochschulschrift
work_keys_str_mv	AT mullerthomas anindustrialcmosprocessfamilyforintegratedsiliconsensors

Holdings

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!

MARC

Record in the Search Index

There is no print copy available.

Similar Items