In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II: 23 - 24 September, 1998, Santa Clara, California
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1998
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
3509 |
| Schlagworte: | |
| Beschreibung: | IX, 244 S. Ill., graph. Darst. |
| ISBN: | 0819429686 |
Internformat
MARC
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| 245 | 1 | 0 | |a In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II |b 23 - 24 September, 1998, Santa Clara, California |c Sergio Ajuria ... chairs |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1998 | |
| 300 | |a IX, 244 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 3509 | |
| 650 | 4 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 4 | |a Manufacturing processes |v Congresses | |
| 650 | 4 | |a Optical pattern recognition |v Congresses | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| _version_ | 1804128025643581440 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV013261394 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4120 |
| ctrlnum | (OCoLC)39869199 (DE-599)BVBBV013261394 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1998 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 1998 Santa Clara Calif. |
| id | DE-604.BV013261394 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:41Z |
| institution | BVB |
| isbn | 0819429686 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009039808 |
| oclc_num | 39869199 |
| open_access_boolean | |
| owner | DE-29T |
| owner_facet | DE-29T |
| physical | IX, 244 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California Sergio Ajuria ... chairs Bellingham, Wash. SPIE 1998 IX, 244 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 3509 Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Congresses Semiconductors Design and construction Congresses Fertigung (DE-588)4016899-2 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Elektroniktechnologie (DE-588)4402723-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Santa Clara Calif. gnd-content Mikroelektronik (DE-588)4039207-7 s Fertigung (DE-588)4016899-2 s DE-604 Elektroniktechnologie (DE-588)4402723-0 s Ajuria, Sergio Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 3509 (DE-604)BV000010887 3509 |
| spellingShingle | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Congresses Semiconductors Design and construction Congresses Fertigung (DE-588)4016899-2 gnd Mikroelektronik (DE-588)4039207-7 gnd Elektroniktechnologie (DE-588)4402723-0 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4039207-7 (DE-588)4402723-0 (DE-588)1071861417 |
| title | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California |
| title_auth | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California |
| title_exact_search | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California |
| title_full | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California Sergio Ajuria ... chairs |
| title_fullStr | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California Sergio Ajuria ... chairs |
| title_full_unstemmed | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II 23 - 24 September, 1998, Santa Clara, California Sergio Ajuria ... chairs |
| title_short | In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II |
| title_sort | in line characterization techniques for performance and yield enhancement in microelectronic manufacturing ii 23 24 september 1998 santa clara california |
| title_sub | 23 - 24 September, 1998, Santa Clara, California |
| topic | Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Congresses Semiconductors Design and construction Congresses Fertigung (DE-588)4016899-2 gnd Mikroelektronik (DE-588)4039207-7 gnd Elektroniktechnologie (DE-588)4402723-0 gnd |
| topic_facet | Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Congresses Semiconductors Design and construction Congresses Fertigung Mikroelektronik Elektroniktechnologie Konferenzschrift 1998 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT ajuriasergio inlinecharacterizationtechniquesforperformanceandyieldenhancementinmicroelectronicmanufacturingii2324september1998santaclaracalifornia |