Characterization and metrology for ULSI technology: 1998 international conference ; Gaithersburg, Maryland, March 1998
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Woodbury, NY
American Inst. of Physics
1998
|
| Series: | American Institute of Physics: AIP conference proceedings
449 |
| Subjects: | |
| Physical Description: | XV, 960 S. Ill., graph. Darst. 1 CD-ROM (12 cm) |
| ISBN: | 1563968681 1563967537 1563968673 |
Staff View
MARC
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Record in the Search Index
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1998 Gaithersburg Md. gnd-content |
| genre_facet | Konferenzschrift 1998 Gaithersburg Md. |
| id | DE-604.BV013241407 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:18Z |
| institution | BVB |
| institution_GND | (DE-588)5349609-7 |
| isbn | 1563968681 1563967537 1563968673 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009023914 |
| oclc_num | 40618877 |
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| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XV, 960 S. Ill., graph. Darst. 1 CD-ROM (12 cm) |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series | American Institute of Physics: AIP conference proceedings |
| series2 | American Institute of Physics: AIP conference proceedings |
| spelling | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... Woodbury, NY American Inst. of Physics 1998 XV, 960 S. Ill., graph. Darst. 1 CD-ROM (12 cm) txt rdacontent n rdamedia nc rdacarrier American Institute of Physics: AIP conference proceedings 449 Circuits intégrés à ultra-grande échelle - Congrès Circuits intégrés à ultra-grande échelle - Congrès ram Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI (DE-588)4117388-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Gaithersburg Md. gnd-content VLSI (DE-588)4117388-0 s DE-604 Seiler, David G. Sonstige oth International Conference on Characterization and Metrology for ULSI Technology 1998 Gaithersburg, Md. Sonstige (DE-588)5349609-7 oth American Institute of Physics: AIP conference proceedings 449 (DE-604)BV001899984 449 |
| spellingShingle | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 American Institute of Physics: AIP conference proceedings Circuits intégrés à ultra-grande échelle - Congrès Circuits intégrés à ultra-grande échelle - Congrès ram Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4117388-0 (DE-588)1071861417 |
| title | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| title_auth | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| title_exact_search | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| title_full | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... |
| title_fullStr | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... |
| title_full_unstemmed | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... |
| title_short | Characterization and metrology for ULSI technology |
| title_sort | characterization and metrology for ulsi technology 1998 international conference gaithersburg maryland march 1998 |
| title_sub | 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| topic | Circuits intégrés à ultra-grande échelle - Congrès Circuits intégrés à ultra-grande échelle - Congrès ram Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI (DE-588)4117388-0 gnd |
| topic_facet | Circuits intégrés à ultra-grande échelle - Congrès Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI Konferenzschrift 1998 Gaithersburg Md. |
| volume_link | (DE-604)BV001899984 |
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