Characterization and metrology for ULSI technology: 1998 international conference ; Gaithersburg, Maryland, March 1998
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Woodbury, NY
American Inst. of Physics
1998
|
| Schriftenreihe: | American Institute of Physics: AIP conference proceedings
449 |
| Schlagworte: | |
| Beschreibung: | XV, 960 S. Ill., graph. Darst. 1 CD-ROM (12 cm) |
| ISBN: | 1563968681 1563967537 1563968673 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV013241407 | ||
| 003 | DE-604 | ||
| 005 | 20010124 | ||
| 007 | t | ||
| 008 | 000710s1998 ad|| |||| 10||| eng d | ||
| 020 | |a 1563968681 |9 1-56396-868-1 | ||
| 020 | |a 1563967537 |9 1-56396-753-7 | ||
| 020 | |a 1563968673 |9 1-56396-867-3 | ||
| 035 | |a (OCoLC)40618877 | ||
| 035 | |a (DE-599)BVBBV013241407 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 | ||
| 050 | 0 | |a TK7874.76 | |
| 082 | 0 | |a 621.39/5 |2 21 | |
| 084 | |a ZN 4950 |0 (DE-625)157424: |2 rvk | ||
| 245 | 1 | 0 | |a Characterization and metrology for ULSI technology |b 1998 international conference ; Gaithersburg, Maryland, March 1998 |c ed.: David G. Seiler ... |
| 264 | 1 | |a Woodbury, NY |b American Inst. of Physics |c 1998 | |
| 300 | |a XV, 960 S. |b Ill., graph. Darst. |e 1 CD-ROM (12 cm) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a American Institute of Physics: AIP conference proceedings |v 449 | |
| 650 | 4 | |a Circuits intégrés à ultra-grande échelle - Congrès | |
| 650 | 7 | |a Circuits intégrés à ultra-grande échelle - Congrès |2 ram | |
| 650 | 4 | |a Integrated circuits |x Ultra large scale integration |v Congresses | |
| 650 | 4 | |a Integrated circuits |x Ultra large scale integration |v Congresses |v Software | |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1998 |z Gaithersburg Md. |2 gnd-content | |
| 689 | 0 | 0 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Seiler, David G. |e Sonstige |4 oth | |
| 711 | 2 | |a International Conference on Characterization and Metrology for ULSI Technology |d 1998 |c Gaithersburg, Md. |j Sonstige |0 (DE-588)5349609-7 |4 oth | |
| 830 | 0 | |a American Institute of Physics: AIP conference proceedings |v 449 |w (DE-604)BV001899984 |9 449 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009023914 | ||
Datensatz im Suchindex
| _version_ | 1804128001854537728 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV013241407 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874.76 |
| callnumber-search | TK7874.76 |
| callnumber-sort | TK 47874.76 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4950 |
| ctrlnum | (OCoLC)40618877 (DE-599)BVBBV013241407 |
| dewey-full | 621.39/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.39/5 |
| dewey-search | 621.39/5 |
| dewey-sort | 3621.39 15 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01888nam a2200445 cb4500</leader><controlfield tag="001">BV013241407</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20010124 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000710s1998 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1563968681</subfield><subfield code="9">1-56396-868-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1563967537</subfield><subfield code="9">1-56396-753-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1563968673</subfield><subfield code="9">1-56396-867-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)40618877</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013241407</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874.76</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.39/5</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4950</subfield><subfield code="0">(DE-625)157424:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Characterization and metrology for ULSI technology</subfield><subfield code="b">1998 international conference ; Gaithersburg, Maryland, March 1998</subfield><subfield code="c">ed.: David G. Seiler ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Woodbury, NY</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XV, 960 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield><subfield code="e">1 CD-ROM (12 cm)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">American Institute of Physics: AIP conference proceedings</subfield><subfield code="v">449</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Circuits intégrés à ultra-grande échelle - Congrès</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Circuits intégrés à ultra-grande échelle - Congrès</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Ultra large scale integration</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Ultra large scale integration</subfield><subfield code="v">Congresses</subfield><subfield code="v">Software</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1998</subfield><subfield code="z">Gaithersburg Md.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Seiler, David G.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Characterization and Metrology for ULSI Technology</subfield><subfield code="d">1998</subfield><subfield code="c">Gaithersburg, Md.</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5349609-7</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">American Institute of Physics: AIP conference proceedings</subfield><subfield code="v">449</subfield><subfield code="w">(DE-604)BV001899984</subfield><subfield code="9">449</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009023914</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1998 Gaithersburg Md. gnd-content |
| genre_facet | Konferenzschrift 1998 Gaithersburg Md. |
| id | DE-604.BV013241407 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:18Z |
| institution | BVB |
| institution_GND | (DE-588)5349609-7 |
| isbn | 1563968681 1563967537 1563968673 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009023914 |
| oclc_num | 40618877 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XV, 960 S. Ill., graph. Darst. 1 CD-ROM (12 cm) |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series | American Institute of Physics: AIP conference proceedings |
| series2 | American Institute of Physics: AIP conference proceedings |
| spelling | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... Woodbury, NY American Inst. of Physics 1998 XV, 960 S. Ill., graph. Darst. 1 CD-ROM (12 cm) txt rdacontent n rdamedia nc rdacarrier American Institute of Physics: AIP conference proceedings 449 Circuits intégrés à ultra-grande échelle - Congrès Circuits intégrés à ultra-grande échelle - Congrès ram Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI (DE-588)4117388-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Gaithersburg Md. gnd-content VLSI (DE-588)4117388-0 s DE-604 Seiler, David G. Sonstige oth International Conference on Characterization and Metrology for ULSI Technology 1998 Gaithersburg, Md. Sonstige (DE-588)5349609-7 oth American Institute of Physics: AIP conference proceedings 449 (DE-604)BV001899984 449 |
| spellingShingle | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 American Institute of Physics: AIP conference proceedings Circuits intégrés à ultra-grande échelle - Congrès Circuits intégrés à ultra-grande échelle - Congrès ram Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4117388-0 (DE-588)1071861417 |
| title | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| title_auth | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| title_exact_search | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| title_full | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... |
| title_fullStr | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... |
| title_full_unstemmed | Characterization and metrology for ULSI technology 1998 international conference ; Gaithersburg, Maryland, March 1998 ed.: David G. Seiler ... |
| title_short | Characterization and metrology for ULSI technology |
| title_sort | characterization and metrology for ulsi technology 1998 international conference gaithersburg maryland march 1998 |
| title_sub | 1998 international conference ; Gaithersburg, Maryland, March 1998 |
| topic | Circuits intégrés à ultra-grande échelle - Congrès Circuits intégrés à ultra-grande échelle - Congrès ram Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI (DE-588)4117388-0 gnd |
| topic_facet | Circuits intégrés à ultra-grande échelle - Congrès Integrated circuits Ultra large scale integration Congresses Integrated circuits Ultra large scale integration Congresses Software VLSI Konferenzschrift 1998 Gaithersburg Md. |
| volume_link | (DE-604)BV001899984 |
| work_keys_str_mv | AT seilerdavidg characterizationandmetrologyforulsitechnology1998internationalconferencegaithersburgmarylandmarch1998 AT internationalconferenceoncharacterizationandmetrologyforulsitechnologygaithersburgmd characterizationandmetrologyforulsitechnology1998internationalconferencegaithersburgmarylandmarch1998 |