(1998). Characterization and metrology for ULSI technology: 1998 international conference ; Gaithersburg, Maryland, March 1998. American Inst. of Physics.
Chicago-Zitierstil (17. Ausg.)Characterization and Metrology for ULSI Technology: 1998 International Conference ; Gaithersburg, Maryland, March 1998. Woodbury, NY: American Inst. of Physics, 1998.
MLA-Zitierstil (9. Ausg.)Characterization and Metrology for ULSI Technology: 1998 International Conference ; Gaithersburg, Maryland, March 1998. American Inst. of Physics, 1998.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.