APA (7th ed.) Citation

Shon-Roy, L., Wiesnoski, A., & Zorich, R. (1998). Advanced semiconductor fabrication handbook. Integrated Circuit Engineering.

Chicago Style (17th ed.) Citation

Shon-Roy, Lita, Allan Wiesnoski, and Robert Zorich. Advanced Semiconductor Fabrication Handbook. Scottsdale, Ariz: Integrated Circuit Engineering, 1998.

MLA (9th ed.) Citation

Shon-Roy, Lita, et al. Advanced Semiconductor Fabrication Handbook. Integrated Circuit Engineering, 1998.