Digest of papers: July 8 - 11, 1996, Kitakyushu, Japan
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Tokyo
Japan Soc. of Applied Physics [u.a.]
1996
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| Subjects: | |
| Physical Description: | XVII, 268 S. Ill., graph. Darst. |
Staff View
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Record in the Search Index
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| physical | XVII, 268 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
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| publisher | Japan Soc. of Applied Physics [u.a.] |
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| spelling | MicroProcess Conference 9 1996 Kitakyūshū Verfasser (DE-588)1901146-5 aut Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference MicroProcess '96 Tokyo Japan Soc. of Applied Physics [u.a.] 1996 XVII, 268 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1996 Kitakyūshū gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Digest of papers July 8 - 11, 1996, Kitakyushu, Japan Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Digest of papers July 8 - 11, 1996, Kitakyushu, Japan |
| title_alt | MicroProcess '96 |
| title_auth | Digest of papers July 8 - 11, 1996, Kitakyushu, Japan |
| title_exact_search | Digest of papers July 8 - 11, 1996, Kitakyushu, Japan |
| title_full | Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference |
| title_fullStr | Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference |
| title_full_unstemmed | Digest of papers July 8 - 11, 1996, Kitakyushu, Japan MicroProcess '96, the 9th International MicroProcess Conference |
| title_short | Digest of papers |
| title_sort | digest of papers july 8 11 1996 kitakyushu japan |
| title_sub | July 8 - 11, 1996, Kitakyushu, Japan |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie Konferenzschrift 1996 Kitakyūshū |
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