Digest of papers 1991: July 15 - 18, 1991, Kanazawa, Japan
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | Undetermined |
| Published: |
Tokyo
Japan Soc. of Applied Physics [u.a.]
1991
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| Subjects: | |
| Physical Description: | XVI, 214 S. Ill., graph. Darst. |
| ISBN: | 4930813425 |
Staff View
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Record in the Search Index
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre_facet | Konferenzschrift 1991 Kanazawa |
| id | DE-604.BV013228700 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:06Z |
| institution | BVB |
| institution_GND | (DE-588)5067999-5 |
| isbn | 4930813425 |
| language | Undetermined |
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| oclc_num | 634944701 |
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| physical | XVI, 214 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Japan Soc. of Applied Physics [u.a.] |
| record_format | marc |
| spelling | MicroProcess Conference 4 1991 Kanazawa Verfasser (DE-588)5067999-5 aut Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan 4th MicroProcess Conference Tokyo Japan Soc. of Applied Physics [u.a.] 1991 XVI, 214 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Kanazawa gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan |
| title_auth | Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan |
| title_exact_search | Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan |
| title_full | Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan 4th MicroProcess Conference |
| title_fullStr | Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan 4th MicroProcess Conference |
| title_full_unstemmed | Digest of papers 1991 July 15 - 18, 1991, Kanazawa, Japan 4th MicroProcess Conference |
| title_short | Digest of papers 1991 |
| title_sort | digest of papers 1991 july 15 18 1991 kanazawa japan |
| title_sub | July 15 - 18, 1991, Kanazawa, Japan |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie Konferenzschrift 1991 Kanazawa |
| work_keys_str_mv | AT microprocessconferencekanazawa digestofpapers1991july15181991kanazawajapan |