Thin films: stresses and mechanical properties V: symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pittsburgh, Pa.
Materials Research Soc.
1995
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| Series: | Materials Research Society: Materials Research Society symposia proceedings
356 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XIX, 901 S. Ill., graph. Darst. |
| ISBN: | 155899257X |
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| 245 | 1 | 0 | |a Thin films: stresses and mechanical properties V |b symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |c ed.: Shefford P. Baker ... |
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| adam_text | MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOLUME 356 THIN FILMS:
STRESSES AND MECHANICAL PROPERTIES V SYMPOSIUM HELD NOVEMBER 28-DECEMBER
2, 1994, BOSTON, MASSACHUSETTS, U.S.A. EDITORS: SHEFFORD P. BAKER
MAX-PLANCK-INSTITUT FUER METALLFORSCHUNG STUTTGART, GERMANY CAROLINE A.
ROSS KOMAG, INCORPORATED MILPITAS, CALIFORNIA, U.S.A. PAUL H. TOWNSEND
DOW CHEMICAL COMPANY MIDLAND, MICHIGAN, U.S.A. CYNTHIA A. VOLKERT AT&T
BELL LABORATORIES MURRAY HILL, NEW JERSEY, U.S.A. PETER BORGESEN
UNIVERSAL INSTRUMENTS CORPORATION BINGHAMTON, NEW YORK, U.S.A. IMIRISI
MATERIALS RESEARCH SOCIETY PITTSBURGH, PENNSYLVANIA CONTENTS PREFACE
XVII ACKNOWLEDGMENTS XIX MATERIALS RESEARCH SOCIETY SYMPOSIUM
PROCEEDINGS XX PART I: EFFECTS OF STRESS ON DIFFUSION, MICROSTRUCTURE
AND SURFACE MORPHOLOGY *STRESS AND ITS EFFECT ON INTERMIXING IN SI,_*GE
X /SI SUPERLATTICES 3 S.M. PROKES PRESSURE-ENHANCED INTERDIFFUSION IN
AMORPHOUS SI/GE MULTILAYERS: IMPLICATIONS FOR DEFECT-MEDIATED DIFFUSION
15 STEVEN D. THEISS, F. SPAEPEN, AND M.J. AZIZ MODELLING AND
MEASUREMENTS OF STRESS-CONTROLLED INTERDIFFUSION IN MULTILAYERED
AMORPHOUS ALLOYS 21 F.L. YANG, W.C. SHIH, AND A.L. GREER MECHANICAL
STRESSES DURING SOLID STATE AMORPHIZATION OF ZR/CO MULTILAYERS 27 M.
MOSKE AND K. SAMWER *A NUMERICAL STUDY OF STRESS CONTROLLED SURFACE
DIFFUSION DURING EPITAXIAL FILM GROWTH 33 CHENG-HSIN CHIU AND HUAJIAN
GAO THREE DIMENSIONAL SURFACE WAVINESS OF AN EPITAXIAL LAYER DUE TO
SURFACE DIFFUSION INDUCED BY INTERFACE MISFIT DISLOCATIONS 45 F.
JONSDOTTIR STRAINED LAYER EPITAXY: A MICROSCOPIC DESCRIPTION OF STRESS
DRIVEN SURFACE DIFFUSION 51 I. LEFEBVRE, C. PRIESTER, G. ALLAN, AND M.
LANNOO RELATIONSHIP BETWEEN STRESS AND SURFACE ROUGHNESS IN KRYPTON
IMPLANTED MGO 57 LAURENCE GEA, JEAN-LUC LOUBET, ROGER BRENIER, AND PAUL
THEVENARD INSTABILITY ANALYSIS OF STRAINED INTERFACES VIA A DISCRETE
ATOM METHOD 63 JONG K. LEE STRESS EVOLUTION KINETICS IN ULTRA THIN
SPUTTERED AU FILMS 69 QUANMIN SU, CECILE BAILLY, MANFRED WUTTIG, SEAN
CORCORAN, AND KARL SIERADZKI * *** INVESTIGATION OF THE EFFECTS OF
TENSILE STRESS ON THIN FILM MICROSTRUCTURE AND SURFACE MORPHOLOGY 75
KAREN E. HARRIS AND ALEXANDER H. KING *INVITED PAPER V EFFECT OF
STRESSES IN THIN FILMS ON DEFECT NUCLEATION 81 A.S. NANDEDKAR
NONHYDROSTATIC STRESS EFFECTS ON SOLID PHASE EPITAXIAL GROWTH IN SILICON
87 WILLIAM B. CARTER AND MICHAEL J. AZIZ DISLOCATION EMISSION AT
SURFACES 93 G.E. BELTZ AND L.B. FREUND MANIPULATION OF STRESSES IN
METALLIC THIN FILMS BY ALLOYING 99 A.S. NANDEDKAR RELATIONSHIP BETWEEN
CRYSTAL STRUCTURE, INTERNAL STRESS AND PROPERTIES IN THE NATURALLY
OCCURRING SUPPORTLESS THIN FILMS OF CHRYSOTILE ASBESTOS 105 GEORGES
DENES, R. LE VAN MAO, AND A. VAILLANCOURT COMPUTER SIMULATION OF
CREATION AND MOTION OF EDGE DISLOCATIONS IN FACE CENTERED CRYSTALS ILL
N. TAJIMA, T. NOZAKI, T. HIRADE, Y. KOGURE, AND MASAO DOYAMA PART II:
RELATIONSHIPS BETWEEN DEPOSITION PARAMETERS, MICROSTRUCTURE AND STRESSES
»ASPECTS OF THE MECHANICAL PROPERTIES OF ELECTRODEPOSITS 119 ROLF WEIL
INTRINSIC STRESS IN SPUTTERED THIN FILMS 131 TAI D. NGUYEN, TUE NGUYEN,
AND JAMES H. UNDERWOOD DEPENDENCE OF STRESS ON BACKGROUND PRESSURE IN
SPUTTERED MO/SI MULTILAYER FILMS 137 DAVID L. WINDT, W.L. BROWN, CA.
VOLKERT, AND W.K. WASKIEWICZ THE GROWTH OF AMORPHOUS CU X TI,_ X FILMS:
RELATIONSHIP BETWEEN INTRINSIC STRESSES AND MICROSTRUCTURE OBSERVED BY
STM 143 U. VON HUELSEN, U. GEYER, S. DINA, AND G. VON MINNIGERODE W/SI
SCHOTTKY DIODES: EFFECT OF METAL DEPOSITION CONDITIONS ON THE BARRIER
HEIGHT 149 M. MAMOR, E. FINKMAN, F. MEYER, AND K. BOUZIANE PROPERTIES OF
TI,_ X AL X N DEPOSITED USING DUAL ROTATABLE MAGNETRONS FOR AUTOMOTIVE
GLASS PRIVACY COATINGS 155 T.S. MORLEY, B.N. VYLETEL, R.L. CRAWLEY, AND
K.E. NIETERING AMORPHOUS SIC-N COATINGS: ITS PROPERTIES AND APPLICATIONS
161 ANDREW L. YEE, HOCKCHUN ONG, FULIN XIONG, AND R.P.H. CHANG STRESS
EVOLUTION DURING THE FORMATION AND TRANSFORMATION OF TITANIUM SILICIDE
167 V. SVILAN, J.M.E. HARPER, * CABRAL, JR., AND L.A. CLEVENGER *INVITED
PAPER UNDERLAYER EFFECTS ON THE GROWTH STRESS OF TITANIUM FILMS 173 M.
POPPELLER AND R. ABERMANN GROWTH, STRUCTURE AND STRESS OF DC MAGNETRON
SPUTTERED TIBJ THIN FILMS 181 H. DENG, J. CHEN, R.B. INTURI, AND J.A.
BARNARD STRESS AND DENSITY OF THIN TIO* FILMS PRODUCED BY DIFFERENT
METHODS . 187 CR. OTTERMANN, M. HEMING, AND K. BANGE TUNABILITY OF
INTRINSIC STRESS IN SIO X DIELECTRIC FILMS FORMED BY MOLECULAR BEAM
DEPOSITION 195 NARESH CHAND, R.R. KOLA, J.W. OSENBACH, AND W.T. TSANG
MECHANICAL PROPERTIES OF ALUMINA FILMS SPUTTERED OVER STEPS 201 C.A.
ROSS AND J.J. BARRESE GROWTH OF HYDROGENATED AMORPHOUS SILICON (A-SI:H)
ON PATTERNED SUBSTRATES FOR INCREASED MECHANICAL STABILITY 209 WAN-SHICK
HONG, J.C. DELGADO, O. RUIZ, AND V. PEREZ-MENDEZ ELASTIC PROPERTIES OF
SILICATE GLASS AND SPIN-ON GLASS THIN FILMS 215 L. DOUCET AND G.
CARLOTTI TEMPERATURE DEPENDENCE OF THE INTRINSIC STRESS AND BIAXIAL
MODULUS OF PLASMA DEPOSITED SILICON NITRIDE AND SILICON OXYNITRIDE FILMS
221 DAVID R. HARDING AND LINUS T. OGBUJI DC-MAGNETRON SPUTTERED SILICON
CARBIDE 227 M. TENHOVER AND I.B. RUPPEL STRUCTURE AND MECHANICAL
PROPERTIES OF NITROGEN INCORPORATED DIAMOND-LIKE CARBON FILMS 233
KWANG-RYEOL LEE, KWANG YONG EUN, AND JAE-SEONG RHEE POTENTIAL
LIMITATIONS OF CONVENTIONAL PHOTOMASKS DUE TO INHERENT INTERNAL
STRESS*THE NEED FOR AN ALTERNATIVE OPAQUE LAYER 239 JAMES A. CAIRNS,
CHI-WING LIU, ANDREW C. HOURD, ROBERT P. KEATCH, AND BRIAN LAWRENSON
PART III: STRUCTURE, STRESSES AND MECHANICAL PROPERTIES IN EPITAXIAL
THIN FILMS »METALLIC THIN FILMS ON CERAMIC SUBSTRATES: STRESS-ENHANCED
INTERMIXING AND SPINEL FORMATION 247 P. PIROUZ, Y. IKUHARA, AND C.P.
FLYNN STACKING FAULT TETRAHEDRA FORMATION DURING GROWTH OF SI,_ X GE X
STRAINED LAYERS ON (111) ORIENTED SI SUBSTRATES: *** OBSERVATIONS AND
DEFECT MODELING 259 DAVID J. HOWARD, ALLAN F. BOWER, AND DAVID C. PAINE
*INVITED PAPER VII MISFIT STRAIN RELIEF BEYOND THE CRITICAL THICKNESS
USING CURVATURE MEASUREMENTS AND IN SITU CHARACTERIZATION OF THE
MAGNETO-OPTIC KERR EFFECT 265 H.E. INGLEFIELD, G. BOCHI, C.A.
BALLENTINE, R.C. O HANDLEY, AND C.V. THOMPSON NANOINDENTATION OF
EPITAXIAL FILMS: A STUDY OF POP-IN EVENTS 271 A.B. MANN, J.B. PETHICA,
W.D. NIX, AND S. TOMIYA COMPOSITION DEPENDENCE OF HARDNESS AND MODULI IN
GESI/SI-HETEROSTRUCTURES MEASURED BY NANOINDENTATION 277 B.S. ROOS, H.
RICHTER, *. MORGENSTERN, AND *. TILLACK ROLE OF DISLOCATION INTERACTIONS
IN DECREASING MOBILE THREADING DISLOCATION DENSITY AND LIMITING STRAIN
RELAXATION IN SI,_ X GE X HETEROEPITAXIAL FILMS 283 VERONIQUE T. GILLARD
AND WILLIAM D. NIX EMISSION OF A HALF-RECTANGULAR DISLOCATION LOOP FROM
THE SURFACE OF A COMPOSITIONALLY GRADED EPILAYER 289 TONG-YI ZHANG
LATTICE PROPERTIES OF GE AND GAAS STRAINED-LAYERS ON SI 295 RESUL
ERYIGIT, ZHIFENG SUI, AND IRVING P. HERMAN DISLOCATION DISTRIBUTIONS IN
CD, HG/TE/CDTE AND CD^XHGJE/CD, ZNTE GROWN BY LIQUID PHASE EPITAXY 301
C.C.R. WATSON, K. DUROSE, E. O KEEFE, J.M. HUDSON, AND B.K. TANNER
PLASMA POTENTIAL MEASUREMENTS AND STRAIN EFFECTS IN EPITAXIAL GAN GROWN
ON AIN BUFFERED SI(LLL) BY RADIO FREQUENCY REACTIVE SPUTTERING 307 W.J.
MENG AND T.A. PERRY X-RAY MEASUREMENTS OF DEFORMATIONS IN FILMS AND
SUBSTRATES IN HETEROEPITAXIAL SYSTEM GAAS/GE 313 N. BURLE, B. PICHAUD,
AND 0. THOMAS A STUDY ON THE STRAIN AND MICROSTRUCTURE IN SIGE FILM
GROWN ON SI(001) SUBSTRATE BY MBE 319 KYOUNG-IK CHO, SAHN NAHM, SANG-GI
KIM, SEUNG-CHANG LEE, KYUNG-SOO KIM, AND SIN-CHONG PARK ELASTIC CONSTANT
EFFECT ON THE CRITICAL THICKNESS OF AN EPILAYER 325 TONG-YI ZHANG
MICROSTRUCTURE AND STRAIN IN GAAS/ALGAAS MQW THIN FILMS BONDED TO
DIFFERENT SUBSTRATES BY EUTECTIC ALLOYING 331 C.H. LIN, H.C. KUO, Y. LU,
H. SHEN, J. PAMULAPATI, M. DUTTA, J.Y. CHENG, F. REN, AND J.M. KUO TWO
STEP GROWTH AND CHARACTERIZATION OF BAF,/SI(III) HETEROSTRUCTURES * 337
A. BELENCHUK, A. FEDOROV, V. LUCASH, A. VASILYEV, AND V. ZENCHENCO PART
IV: STRUCTURE, STRESSES AND MECHANICAL PROPERTIES IN MULTILAYERED THIN
FILMS IN SITU STUDY OF STRESSES IN AG/CU THIN FILM MULTILAYERS DURING
DEPOSITION 345 ALISON L. SHULL, HOWARD G. ZOLLA, AND FRANS SPAEPEN
MEASUREMENT OF THE EFFECT OF TEMPERATURE ON STRESS DISTRIBUTION AND
DEFORMATION IN MULTILAYER OPTICAL THIN FILM STRUCTURES 351 CYNTHIA G.
MADRAS, P.Y. WONG, I.N. MIAOULIS, AND L.M. GOLDMAN DETERMINING
INTERFACIAL FREE ENERGIES FROM CREEP EXPERIMENTS ON SILVER-IRON
MULTILAYERS 357 D. JOSELL AND Z.L. WANG MECHANICAL PROPERTIES OF AG/CR
MULTILAYERED EPITAXIAL THIN FILMS 363 GERALD R. ENGLISH, GLENN F.
SIMENSON, BRUCE M. CLEMENS, AND WILLIAM D. NIX DEPENDENCE OF HARDNESS ON
MODULATION AMPLITUDE IN COMPOSITIONALLY MODULATED CU-NI THIN FILMS 369
R.R. OBERLE AND R.C. CAMMARATA EFFECT OF STRUCTURE, STRESS, STRAIN, AND
ALLOYING ON THE HARDNESS OF FE(001)/PT(001) EPITAXIAL MULTILAYERS 373
B.J. DANIELS, W.D. NIX, AND B.M. CLEMENS STRAIN AND INTERDIFFUSION
PROFILES IN EPITAXIED AU/NI(100) MULTILAYERS DEDUCED FROM X-RAY
DIFFRACTION EXPERIMENTS 379 B. GILLES AND A. MARTY BRILLOUIN LIGHT
SCATTERING INVESTIGATION OF THE ELASTIC PROPERTIES OF **/AL METALLIC
SUPERLATTICES 385 G. CARLOTTI, D. FIORETTO, G. SOCINO, HUA XIA, AN HU,
AND S.S. JIANG MECHANICAL PROPERTIES AND MICROSTRUCTURE OF CU/CU-NI AND
CU/AG MULTILAYER THIN FILMS 391 JAMES E. KRZANOWSKI AND PETER DUGGAN
MECHANICAL PROPERTIES OF SPUTTER-DEPOSITED NB 5 SI 3 AND NB 5 SI 3 /NB
MICROLAMINATES S.P. RAWAL, G.M. SWANSON, W.C. MOSHIER, AND M.S. MISRA
FILM AND NB 5 SI 3 /NB MICROLAMINATES 397 STRESS IN GIANT
MAGNETORESISTIVE NI 66 FE 16 CO 18 /AG MULTILAYER THIN FILMS 403 J.D.
JARRATT AND J.A. BARNARD CALCULATION OF THE (GAASWALAS). SUPERLATTICE
PIEZOELECTRIC CONSTANTS 409 VADIM YU. MIROVITSKII PART V:
ELECTROMIGRATION, STRUCTURE, STRESSES AND MECHANICAL PROPERTIES IN
INTERCONNECT AND PASSIVATION MATERIALS IN-SITU ELECTROMIGRATION
STRESSING IN TRANSMISSION ELECTRON MICROSCOPY FOR AL-CU INTERCONNECTS
417 W.C. SHIH AND A.L. GREER IX THERMAL STRESSES IN PASSIVATED
AISICU-LINES FROM WAFER CURVATURE MEASUREMENT 423 U. BURGES, H.
HELNEDER, M. SCHNEEGANS, D. BECKERS, M. HALLERBACH, H. SCHROEDER, AND W.
SCHILLING MEASUREMENT OF THE DEPENDENCE OF STRESS AND STRAIN ON
CRYSTALLOGRAPHIC ORIENTATION IN CU AND AL THIN FILMS 429 E.M. ZIELINSKI,
R.P. VINCI, AND J.* BRAVMAN MECHANICAL PROPERTIES AND MICROSTRUCTURE OF
AL(LWT%SI) AND AL(LWT%SI, 0.5WT%CU) THIN FILMS. THE ROLE OF DIFFUSIONAL
CREEP IN THE TENSILE STRESS REGIME 435 S. BADER, E.M. KALAUGHER, AND E.
ARZT STRESS RELAXATION IN AL-SI-CU THIN FILMS AND LINES 441 A. WITVROUW,
J. PROOST, B. DEWEERDT, PH. ROUSSEL, AND K. MAEX CORRELATION OF THE
STRESS-TEMPERATURE HISTORY WITH MICROSTRUCTURE IN AL-0.5CU AND AL-0.15PD
THIN FILMS 447 D.D. KNORR AND K.P. RODBELL INFLUENCE OF A CAPPING LAYER
ON THE MECHANICAL PROPERTIES OF COPPER FILMS 453 R.-M. KELLER, S. BADER,
R.P. VINCI, AND E. ARZT EFFECT OF COPPER FILM THICKNESS ON STRESS AND
STRAIN IN GRAINS OF DIFFERENT ORIENTATION 459 R.P. VINCI, E.M.
ZIELINSKI, AND J.C. BRAVMAN THE EFFECT OF INTRINSIC PASSIVATION STRESS
ON STRESS IN ENCAPSULATED INTERCONNECT LINES 465 ANNE SAUTER MACK AND
PAUL FLINN EFFECT OF CU AND SI IN ALUMINUM ON STRESS CHANGE AND ON TIAL
FORMATION IN AL ALLOY/TI BILAYER FILMS DURING ANNEALING 471 DIRK D.
BROWN, PAUL R. BESSER, JOHN E. SANCHEZ, JR., MATT A. KORHONEN, AND
CHE-YU LI STRESS THAT COUNTERACTS ELECTROMIGRATION: THRESHOLD VERSUS
KINETIC APPROACH 477 E. GLICKMAN, N. OSIPOV, AND A. IVANOV
ELECTROPLASTICITY AND ELECTROMIGRATION 483 SHEFFORD P. BAKER, MICHAEL P.
KNAUSS, ULRICH E. MOECKL, AND EDUARD ARZT AFM/SEM STUDY OF THERMALLY
INDUCED HILLOCK COALESCENCE 489 J. CHAIKEN, JERRY GOODISMAN, R.M.
VILLARICA, J.V. BEASOCK, AND L.H. WALSH STRESS BEHAVIOR OF CVD-PSG FILMS
DEPENDING ON DEPOSITION METHODS AND HILLOCK SUPPRESSION 495 EUNGSOO KIM,
SUK-HEE KANG, AND SOON-KWON LIM MORPHOLOGY OF DAMAGE IN AL FILMS TESTED
UNDER ELECTROMIGRATION CONDITIONS USING THE DRIFT VELOCITY METHOD 501
OLEG V. KONONENKO AND V.N. MATVEEV EFFECT OF MECHANICAL STRESS ON
ELECTROMIGRATION FAILURE MODE DURING ACCELERATED ELECTROMIGRATION TESTS
507 S. PRAMANICK, D.D. BROWN, V. PHAM, P. BESSER, J. SANCHEZ, N. BUI, R.
HIJAB, AND J.T. YUE PART VI: MECHANICAL PROPERTIES OF POLYMER COATINGS
*A METHOD FOR ANALYZING THE CRITICAL ADHESION ENERGY OF THIN FILM
COATINGS 515 FREDERICK J. MCGARRY AND EDWARD O. SHAFFER II ELASTIC
PROPERTIES AND STRESSES IN POLYIMIDE THIN FILMS AND COATINGS 529 KAPIL
C. SHETH, MICHAEL J. CHEN, AND RICHARD J. FARRIS EFFECT OF ANNEALING ON
HIGH FREQUENCY VISCOELASTIC WAVES IN SPINCOATED POLYMER THIN FILMS 535
J.R. DUTCHER, Z. WANG, B.J. NEAL, T. COPELAND, AND J.R. STEVENS
DEVELOPMENT OF A TECHNIQUE FOR THE IN-SITU MEASUREMENT OF THE MECHANICAL
PROPERTIES OF ULTRA-THIN INTERFACIALLY POLYMERIZED FILMS 541 ALAN R.
GREENBERG, VIVEK P. KHARE, AND WILLIAM B. KRANTZ STRESS EFFECTS IN
DRYING POLYMER FILMS 547 S.Y. TAM, L.E. SCRIVEN, AND H.K. STOLARSKI PART
VII: ADVANCES IN MEASUREMENT TECHNIQUES IN-PROCESS EVALUATION OF KINETIC
ENERGY OF SPUTTER DEPOSITING ATOMS USING MULTIJUNCTION THERMAL
CONVERTERS 555 QUANMIN SU, D.X. HUANG, AND MANFRED WUTTIG MEASUREMENTS
OF ELASTIC MODULUS USING LASER-INDUCED SURFACE WAVES 561 D.J. CHANG,
S.T. AMIMOTO, R.W. GROSS, AND T.S. GLENN ELASTIC PROPERTIES OF THIN
FILMS 567 B.E. WHITE JR. AND R.O. POHL IN SITU MEASUREMENT OF YOUNG S
MODULUS AND RESIDUAL STRESS OF THIN ELECTROLESS NICKEL FILMS FOR MEMS
APPLICATIONS 573 S. ROY, S. FURUKAWA, H. MIYAJIMA, AND M. MEHREGANY
MEASURING THE MECHANICAL PROPERTIES OF THIN METAL FILMS BY MEANS OF
BULGE TESTING OF MICROMACHINED WINDOWS 579 V.M. PAVIOT, J.J. VLASSAK,
AND W.D. NIX BLISTER TEST ANALYSIS METHODS 585 ROBERT J. HOHLFELDER,
JOOST J. VLASSAK, WILLIAM D. NIX, HUIHONG LUO, AND CHRISTOPHER E.D.
CHIDSEY IN-SITU FLUORESCENC E STRAIN SENSING OF THE STRESS IN
INTERCONNECTS 591 Q. WEN, Q. MA, AND D.R. CLARKE *INVITED PAPER XI
MEASUREMENT OF RESIDUAL STRESS IN **, SOL-GEL THIN FILMS USING RAMAN
SPECTROSCOPY 597 NANCY J. HESS AND GREGORY J. EXARHOS PRINCIPAL
RESIDUAL STRAINS AS A FUNCTION OF DEPTH FOR SPUTTER DEPOSITED MO THIN
FILMS 603 S.G. MALHOTRA, Z.U. REK, L.J. PARFITT, S.M. YALISOVE, AND J.*
BILELLO TEMPERATURE DEPENDENCE OF RESIDUAL STRESSES AND STRESS
RELAXATION IN BLANKET FILMS OF VARIOUS THICKNESSES 609 A.P. CLARKE, G.
LANGELAAN, AND S. SAIMOTO MASKLESS SINGLE-SIDED WET ETCHING PROCESS FOR
THE FABRICATION OF ULTRA-LOW DISTORTION POLYIMIDE MEMBRANES 615 M.L.
SCHATTENBURG, R.I. FUENTES, G. CZERNIENKO, R.C. FLEMING, AND J. PORTER
PHOTOACOUSTIC METHOD FOR OBTAINING STRENGTH CHARACTERISTICS OF THIN
FILMS 621 I.A. KONOVALOV AND S.K. SKLYARENKO PART VIII: SUBMICRON
INDENTATION: EXPERIMENTS, THEORY AND TECHNIQUE *YIELD POINT PHENOMENA
AND DISLOCATION VELOCITIES UNDERNEATH INDENTATIONS INTO BCC CRYSTALS 629
W.W. GERBERICH, S. VENKATARAMAN, J. NELSON, H. HUANG, E. LILLEODDEN, AND
W. BONIN TIME DEPENDENT INDENTATION TESTING AT NON-AMBIENT TEMPERATURES
UTILIZING THE HIGH TEMPERATURE MECHANICAL PROPERTIES MICROPROBE 645 B.N.
LUCAS AND W.C. OLIVER INDENTATION CREEP OF MOLYBDENUM: COMPARISON
BETWEEN THIN FILM AND BULK MATERIAL 651 K.B. YODER, D.S. STONE, J.C.
LIN, AND R.A. HOFFMANN INDENTATION AT THE NANOMETER SCALE ON ULTRA THIN
FILMS OF DIAMOND-LIKE CARBON 657 SANDRINE BEE, ANDRE TONCK, AND JEAN-LUC
LOUBET CRACKING DURING NANOINDENTATION AND ITS USE IN THE MEASUREMENT OF
FRACTURE TOUGHNESS 663 D.S. HARDING, W.C. OLIVER, AND G.M. PHARR
INDENTATION BEHAVIOR OF A BRITTLE FILM/BRITTLE SUBSTRATE COMPOSITE 669
CM. CZARNIK, R. GIBALA, 0. BARON, M. NASTASI, AND T.R. JERVIS AN
EXPLANATION FOR THE SHAPE OF NANOINDENTATION UNLOADING CURVES BASED ON
FINITE ELEMENT SIMULATION 675 A. BOLSHAKOV, W.C. OLIVER, AND G.M. PHARR
NANOMECHANICAL RESPONSE OF MATERIALS AND THIN FILM SYSTEMS: FINITE
ELEMENT SIMULATION 681 S.A. SYED ASIF, B. DERBY, AND S.G. ROBERTS
*INVITED PAPER XII ELASTIC, TRANSVERSELY ISOTROPIC FILM INDENTED BY A
PUNCH; APPLICATION TO MULTILAYERED THIN FILMS 687 D.S. STONE THIN FILM
FINE LINE WORK OF ADHESION BY MICROWEDGE INDENTATION 693 M.P. DE BOER,
N.R. MOODY, H. HUANG, AND W.W. GERBERICH THE INDENTATION ELASTIC
RESPONSE-INDENTATION SHAPE AND THE STRESS DISTRIBUTION 699 B.C. HENDRIX,
KE-WEI XU, JUN-HAI LIU, AND JIA-WEN HE NANOHARDNESS MEASUREMENTS ON THIN
FILMS 705 K.R. UPADHYAYA, S. SAIMOTO, AND R.S. TIMSIT STUDIES OF ULTRA
MICRO INDENTED MULTILAYERED SOL-GEL ZIRCONIA FILMS 711 AE. JAEMTING, *.
BEN-NISSAN, I. ASHCROFT, M.V. SWAIN, AND J.M. BELL ERROR ANALYSIS IN
NANOINDENTATION 717 G. SHAFIRSTEIN, M.G. GEE, S. OSGERBY, AND S.R.J.
SAUNDERS ELASTIC MODULUS AND HARDNESS AS DERIVED FROM NANOINDENTATION OF
NI AND MO FILMS PREPARED BY ION BEAM ASSISTED DEPOSITION 723 A.
WROBLEWSKI, N. CHECHENIN, J. BOTTIGER, J. CHEVALLIER, N. KARPE, AND J.P.
KROG MECHANICAL PROPERTIES OF PLATINUM FILMS ON SILICON AND GLASS
DETERMINED BY ULTRA-MICROINDENTATION 729 JAROSLAV MENCIK AND MICHAEL V.
SWAIN PART IX: FRACTURE, ADHESION AND WEAR OF THIN FILMS *NANO-HARDNESS,
NANO-FRICTION AND NANO-WEAR OF ULTRA-THIN OVERCOATS 737 D.B. BOGY AND
ZHAOGUO JIANG ULTRA-THIN CARBON COATINGS FOR HEAD-DISK INTERFACE
TRIBOLOGY 749 J.N. GLOSLI, J. BELAK, AND M.R. PHILPOTT STUDIES ON WEAR
MECHANISM OF ULTRATHIN PROTECTIVE CARBON OVERCOAT BY MICRO-WEAR SCAN
TECHNIQUE 755 T.W. WU WEAR AND ADHESION OF THIN CARBON COATINGS 761
HSIN-FU WANG, JOHN C. NELSON, CHIEN-LI LIN, JOEL W. HOEHN, AND WILLIAM
W. GERBERICH NANOINDENTATION AND NANOSCRATCHING OF HARD COATING
MATERIALS FOR MAGNETIC DISKS 767 T.Y. TSUI, G.M. PHARR, W.C. OLIVER,
Y.W. CHUNG, E.C. CUTIONGCO, CS. BHATIA, R.L. WHITE, R.L. RHOADES, AND
S.M. GORBATKIN MECHANICAL PROPERTIES AND WEAR RESISTANCE OF HIGH MOMENT
THIN FILM HEAD MATERIALS 773 H. DENG, V.R. INTURI, AND J.A. BARNARD
*INVITED PAPER XIII MEASUREMENT OF FRICTION COEFFICIENTS BETWEEN
DIAMOND-LIKE CARBON COATED VCR HEAD DRUM AND VCR TAPES 779 KWANG-RYEOL
LEE AND KWANG YONG EUN MICRO-TRIBOLOGICAL STUDY OF COBALT ALLOYS WITH
AND WITHOUT A CARBON COATING 785 HSIN-FU WANG, JOHN C. NELSON, AND
WILLIAM W. GERBERICH ION BEAM MIXING OF TITANIUM OVERLAYERS WITH HYDROXY
APATITE SUBSTRATES 791 TIMOTHY E. LEVINE, MICHAEL NASTASI, T.L. ALFORD,
CARLOS SUCHICITAL, STEPHEN RUSSELL, KAREN LUPTAK, VINCENT PIZZICONI, AND
JAMES W. MAYER TRIBOLOGY AND SURFACE MECHANICAL PROPERTIES OF EXCIMER
LASER NITRIDED TITANIUM 797 T.R. JERVIS, J.P. HIRVONEN, T.G. ZOCCO, AND
J.R. TESMER HARDNESS AND TRIBOLOGICAL EFFECTS OF ION IMPLANTATION ON
ELECTROPLATED CHROMIUM 803 KATHRYN E. NOLL AND CHRISTOPH STEINBRUECHEL
EFFECTS OF INTERLAYERS ON THE SCRATCH ADHESION PERFORMANCE OF ULTRA-THIN
FILMS OF COPPER AND GOLD ON SILICON SUBSTRATES 809 S.D. MCADAMS, T.Y.
TSUI, W.C. OLIVER, AND G.M. PHARR EVALUATION OF THE MECHANICAL
PROPERTIES OF TRIBOCHEMICAL FILMS ON ALUMINA 815 M.G. GEE AND N.M.
JENNETT THIN FILM ADHESION CHARACTERIZATION BY MICROWEDGE SCRATCHING OF
PRECRACKED FINE LINES 821 M.P. DE BOER, H. HUANG, AND W.W. GERBERICH
HYDROGEN EFFECTS ON THE FRACTURE OF THIN TANTALUM NITRIDE FILMS 827 N.R.
MOODY, S.K. VENKATARAMAN, B. BASTASZ, J.E. ANGELO, AND W.W. GERBERICH
DIELECTRIC FRACTURE LEADING TO METALLIC CONNECTIONS BY LASER HEATING 833
J.B. BERNSTEIN INFLUENCE OF AGING PROCESSES ON ADHESION PROPERTIES OF
METALLIC AND OXIDIC THIN FILMS 839 CR. OTTERMANN, Y. TOMITA, M.
ISHIYAMA, AND K. BANGE MODELING OF THERMAL STRESSES IN COMPOSITE DIAMOND
COATINGS AND MECHANISMS OF IMPROVEMENT OF ADHESION 847 W.D. FAN, K.
JAGANNADHAM, AND J. NARAYAN FRACTURE BEHAVIOR IN AMORPHOUS AND CERAMIC
COATINGS ON ALUMINUM ALLOY SUBSTRATE 853 J. KAMEDA AND R. RANJAN STRESS
AND ADHESION OF CVD COPPER AND TIN 859 TUE NGUYEN AND DAVID R. EVANS
SCANNING SCRATCH TESTS FOR EVALUATING THE ADHESION OF THIN OXIDE FILMS
ON STAINLESS STEEL 863 V.A.C. HAANAPPEL, H.D. VAN CORBACH, T. FRANSEN,
AND P.J. GELLINGS XIV DIE ATTACH ADHESION AND VOID FORMATION AT THE GAAS
SUBSTRATE INTERFACE 869 NICKOLAOS STRIFAS AND ARIS CHRISTOU PRACTICAL
AND FUNDAMENTAL STUDIES OF NANOCRYSTALLINE COMPOSITE THIN FILMS 875
YANG-TSE CHENG, BOQIN QUI, SIMON TUNG, J.P. BLANCHARD, AND G. DREW ON
SEPARATING BONDING STRENGTH FROM FILM AND SUBSTRATE PROPERTIES 881
JIA-WEN HE, B.C. HENDRIX, MAO-ZHONG YI, AND NAI-SAI HU EVALUATION OF
DIAMOND-LIKE CARBON AS A PROTECTIVE COATING FOR HOLOGRAPHIC FILTERS 887
PEARL W. YIP AND PETER G. DEHMER AUTHOR INDEX 893 SUBJECT INDEX 897 XV
|
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| genre | (DE-588)1071861417 Konferenzschrift 1994 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1994 Boston Mass. |
| id | DE-604.BV013227746 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:05Z |
| institution | BVB |
| isbn | 155899257X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009014801 |
| oclc_num | 32869427 |
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| owner_facet | DE-703 |
| physical | XIX, 901 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: Shefford P. Baker ... Pittsburgh, Pa. Materials Research Soc. 1995 XIX, 901 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 356 Thin films Mechanical properties Congresses Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Mechanische Eigenschaft (DE-588)4217961-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1994 Boston Mass. gnd-content Dünne Schicht (DE-588)4136925-7 s Mechanische Eigenschaft (DE-588)4217961-0 s DE-604 Baker, Shefford P. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 356 (DE-604)BV001899105 356 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009014801&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Thin films Mechanical properties Congresses Dünne Schicht (DE-588)4136925-7 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4217961-0 (DE-588)1071861417 |
| title | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_auth | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_exact_search | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| title_full | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: Shefford P. Baker ... |
| title_fullStr | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: Shefford P. Baker ... |
| title_full_unstemmed | Thin films: stresses and mechanical properties V symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. ed.: Shefford P. Baker ... |
| title_short | Thin films: stresses and mechanical properties V |
| title_sort | thin films stresses and mechanical properties v symposium held november 28 december 2 1994 boston massachusetts u s a |
| title_sub | symposium held November 28 - December 2, 1994, Boston, Massachusetts, U.S.A. |
| topic | Thin films Mechanical properties Congresses Dünne Schicht (DE-588)4136925-7 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd |
| topic_facet | Thin films Mechanical properties Congresses Dünne Schicht Mechanische Eigenschaft Konferenzschrift 1994 Boston Mass. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009014801&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001899105 |
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