Rapid thermal processing: proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Amsterdam [u.a.]
Elsevier
1999
|
| Series: | European Materials Research Society: European Materials Research Society symposia proceedings
84 |
| Subjects: | |
| Item Description: | Aus: Materials science in semiconductor processing ; 1,3/4 |
| Physical Description: | S. 167 - 350 Ill., graph. Darst. |
| ISBN: | 0080436129 |
Staff View
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| genre_facet | Konferenzschrift 1998 Strassburg |
| id | DE-604.BV013213055 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:41:46Z |
| institution | BVB |
| institution_GND | (DE-588)5327966-9 |
| isbn | 0080436129 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009002256 |
| oclc_num | 41674940 |
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| physical | S. 167 - 350 Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Elsevier |
| record_format | marc |
| series | European Materials Research Society: European Materials Research Society symposia proceedings |
| series2 | European Materials Research Society: European Materials Research Society symposia proceedings |
| spelling | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 ed. by A. Slaoui ... Amsterdam [u.a.] Elsevier 1999 S. 167 - 350 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier European Materials Research Society: European Materials Research Society symposia proceedings 84 Aus: Materials science in semiconductor processing ; 1,3/4 Integrated circuits Ultra large scale integration Design and construction Congresses Rapid thermal processing Congresses Semiconductor doping Congresses Rapid thermal processing (DE-588)4347011-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1998 Strassburg gnd-content Rapid thermal processing (DE-588)4347011-7 s DE-604 Slaoui, Abdelilah Sonstige oth Symposium Rapid Thermal Processing 1998 Straßburg Sonstige (DE-588)5327966-9 oth European Materials Research Society: European Materials Research Society symposia proceedings 84 (DE-604)BV004201591 84 |
| spellingShingle | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 European Materials Research Society: European Materials Research Society symposia proceedings Integrated circuits Ultra large scale integration Design and construction Congresses Rapid thermal processing Congresses Semiconductor doping Congresses Rapid thermal processing (DE-588)4347011-7 gnd |
| subject_GND | (DE-588)4347011-7 (DE-588)1071861417 |
| title | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 |
| title_auth | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 |
| title_exact_search | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 |
| title_full | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 ed. by A. Slaoui ... |
| title_fullStr | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 ed. by A. Slaoui ... |
| title_full_unstemmed | Rapid thermal processing proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 ed. by A. Slaoui ... |
| title_short | Rapid thermal processing |
| title_sort | rapid thermal processing proceedings of symposium i on rapid thermal processing of the e mrs 1998 spring conference strasbourg france 16 19 june 1998 |
| title_sub | proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16 - 19 June 1998 |
| topic | Integrated circuits Ultra large scale integration Design and construction Congresses Rapid thermal processing Congresses Semiconductor doping Congresses Rapid thermal processing (DE-588)4347011-7 gnd |
| topic_facet | Integrated circuits Ultra large scale integration Design and construction Congresses Rapid thermal processing Congresses Semiconductor doping Congresses Rapid thermal processing Konferenzschrift 1998 Strassburg |
| volume_link | (DE-604)BV004201591 |
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