Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology:
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Pennington, NJ
Electrochemical Soc.
1993
|
| Series: | Electrochemical Society: Proceedings
1993,6 |
| Subjects: | |
| Physical Description: | XI, 628 S. Ill., graph. Darst. |
| ISBN: | 1566770645 |
Staff View
MARC
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| 245 | 1 | 0 | |a Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology |c ed. by G. R. Srinivasan ... |
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Record in the Search Index
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1993 Honolulu Hawaii gnd-content |
| genre_facet | Konferenzschrift 1993 Honolulu Hawaii |
| id | DE-604.BV013177165 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:40:20Z |
| institution | BVB |
| institution_GND | (DE-588)5146172-9 |
| isbn | 1566770645 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008978355 |
| oclc_num | 28456767 |
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| physical | XI, 628 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | International Symposium on Process Physics and Modeling in Semiconductor Technology 3 1993 Honolulu, Hawaii Verfasser (DE-588)5146172-9 aut Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology ed. by G. R. Srinivasan ... Process physics and modeling in semiconductor technology Pennington, NJ Electrochemical Soc. 1993 XI, 628 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1993,6 Semiconducteurs - Modèles mathématiques ram Mathematisches Modell Semiconductors Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1993 Honolulu Hawaii gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Srinivasan, G. R. Sonstige oth Electrochemical Society: Proceedings 1993,6 (DE-604)BV001900941 1993,6 |
| spellingShingle | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology Electrochemical Society: Proceedings Semiconducteurs - Modèles mathématiques ram Mathematisches Modell Semiconductors Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_alt | Process physics and modeling in semiconductor technology |
| title_auth | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_exact_search | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_full | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology ed. by G. R. Srinivasan ... |
| title_fullStr | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology ed. by G. R. Srinivasan ... |
| title_full_unstemmed | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology ed. by G. R. Srinivasan ... |
| title_short | Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology |
| title_sort | proceedings of the third international symposium on process physics and modeling in semiconductor technology |
| topic | Semiconducteurs - Modèles mathématiques ram Mathematisches Modell Semiconductors Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Semiconducteurs - Modèles mathématiques Mathematisches Modell Semiconductors Congresses Semiconductors Mathematical models Congresses Halbleitertechnologie Konferenzschrift 1993 Honolulu Hawaii |
| volume_link | (DE-604)BV001900941 |
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