International Symposium on Process Physics and Modeling in Semiconductor Technology Honolulu, Hawaii. (1993). Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. Electrochemical Soc.
Chicago-Zitierstil (17. Ausg.)International Symposium on Process Physics and Modeling in Semiconductor Technology Honolulu, Hawaii. Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. Pennington, NJ: Electrochemical Soc, 1993.
MLA-Zitierstil (9. Ausg.)International Symposium on Process Physics and Modeling in Semiconductor Technology Honolulu, Hawaii. Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. Electrochemical Soc, 1993.