Silicon nitride and silicon dioxide thin insulating films: proceedings of the fifth international symposium
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pennington, NJ
Electrochemical Soc.
1999
|
| Series: | Electrochemical Society: Proceedings
1999,6 |
| Subjects: | |
| Physical Description: | XI, 284 S. Ill., graph. Darst. |
| ISBN: | 1566772281 |
Staff View
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| 245 | 1 | 0 | |a Silicon nitride and silicon dioxide thin insulating films |b proceedings of the fifth international symposium |c ed. K. B. Sundaram ... |
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Record in the Search Index
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| genre | (DE-588)1071861417 Konferenzschrift 1999 Seattle Wash. gnd-content |
| genre_facet | Konferenzschrift 1999 Seattle Wash. |
| id | DE-604.BV013156335 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:40:00Z |
| institution | BVB |
| isbn | 1566772281 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008963890 |
| oclc_num | 42774436 |
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| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XI, 284 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium ed. K. B. Sundaram ... Pennington, NJ Electrochemical Soc. 1999 XI, 284 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1999,6 Dispositifs à couches minces ram Isolation électrique ram Nitrure de silicium ram Silice ram Electric insulators and insulation Thin films Congresses Silicon dioxide Congresses Silicon nitride Congresses Thin film devices Congresses Siliciumdioxid (DE-588)4077447-8 gnd rswk-swf Siliciumnitrid (DE-588)4127841-0 gnd rswk-swf Isolierschicht (DE-588)4147018-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Seattle Wash. gnd-content Siliciumnitrid (DE-588)4127841-0 s Siliciumdioxid (DE-588)4077447-8 s Isolierschicht (DE-588)4147018-7 s DE-604 Sundaram, K. B. Sonstige oth Electrochemical Society: Proceedings 1999,6 (DE-604)BV001900941 1999,6 |
| spellingShingle | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium Electrochemical Society: Proceedings Dispositifs à couches minces ram Isolation électrique ram Nitrure de silicium ram Silice ram Electric insulators and insulation Thin films Congresses Silicon dioxide Congresses Silicon nitride Congresses Thin film devices Congresses Siliciumdioxid (DE-588)4077447-8 gnd Siliciumnitrid (DE-588)4127841-0 gnd Isolierschicht (DE-588)4147018-7 gnd |
| subject_GND | (DE-588)4077447-8 (DE-588)4127841-0 (DE-588)4147018-7 (DE-588)1071861417 |
| title | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium |
| title_auth | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium |
| title_exact_search | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium |
| title_full | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium ed. K. B. Sundaram ... |
| title_fullStr | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium ed. K. B. Sundaram ... |
| title_full_unstemmed | Silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium ed. K. B. Sundaram ... |
| title_short | Silicon nitride and silicon dioxide thin insulating films |
| title_sort | silicon nitride and silicon dioxide thin insulating films proceedings of the fifth international symposium |
| title_sub | proceedings of the fifth international symposium |
| topic | Dispositifs à couches minces ram Isolation électrique ram Nitrure de silicium ram Silice ram Electric insulators and insulation Thin films Congresses Silicon dioxide Congresses Silicon nitride Congresses Thin film devices Congresses Siliciumdioxid (DE-588)4077447-8 gnd Siliciumnitrid (DE-588)4127841-0 gnd Isolierschicht (DE-588)4147018-7 gnd |
| topic_facet | Dispositifs à couches minces Isolation électrique Nitrure de silicium Silice Electric insulators and insulation Thin films Congresses Silicon dioxide Congresses Silicon nitride Congresses Thin film devices Congresses Siliciumdioxid Siliciumnitrid Isolierschicht Konferenzschrift 1999 Seattle Wash. |
| volume_link | (DE-604)BV001900941 |
| work_keys_str_mv | AT sundaramkb siliconnitrideandsilicondioxidethininsulatingfilmsproceedingsofthefifthinternationalsymposium |