Papers from the 12th International Vacuum Microelectronics Conference: 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York
American Inst. of Physics
2000
|
| Series: | Journal of vacuum science & technology / B
18,2 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-H. |
| Physical Description: | S. 881 - 1121 graph. Darst. |
Staff View
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| genre_facet | Konferenzschrift 1999 Darmstadt |
| id | DE-604.BV013150610 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:39:54Z |
| institution | BVB |
| institution_GND | (DE-588)2180138-1 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008959708 |
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| physical | S. 881 - 1121 graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology / B |
| spelling | International Vacuum Microelectronics Conference 12 1999 Darmstadt Verfasser (DE-588)2180138-1 aut Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland eds. for the conference: Klaus Beilenhoff ... New York American Inst. of Physics 2000 S. 881 - 1121 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 18,2 Einzelaufnahme eines Zeitschr.-H. Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf Vakuumelektronik (DE-588)4214651-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Darmstadt gnd-content Mikroelektronik (DE-588)4039207-7 s Vakuumtechnik (DE-588)4062270-8 s DE-604 Vakuumelektronik (DE-588)4214651-3 s Beilenhoff, Klaus Sonstige oth |
| spellingShingle | Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland Mikroelektronik (DE-588)4039207-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd Vakuumelektronik (DE-588)4214651-3 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4062270-8 (DE-588)4214651-3 (DE-588)1071861417 |
| title | Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland |
| title_auth | Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland |
| title_exact_search | Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland |
| title_full | Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland eds. for the conference: Klaus Beilenhoff ... |
| title_fullStr | Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland eds. for the conference: Klaus Beilenhoff ... |
| title_full_unstemmed | Papers from the 12th International Vacuum Microelectronics Conference 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland eds. for the conference: Klaus Beilenhoff ... |
| title_short | Papers from the 12th International Vacuum Microelectronics Conference |
| title_sort | papers from the 12th international vacuum microelectronics conference 6 9 july 1999 darmstadt germany 12 13 july 1999 wroclaw poland |
| title_sub | 6 - 9 July 1999, Darmstadt, Germany, 12 - 13 July 1999 Wroclaw, Poland |
| topic | Mikroelektronik (DE-588)4039207-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd Vakuumelektronik (DE-588)4214651-3 gnd |
| topic_facet | Mikroelektronik Vakuumtechnik Vakuumelektronik Konferenzschrift 1999 Darmstadt |
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