An introduction to microelectromechanical systems engineering:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston [u.a.]
Artech House
2000
|
| Series: | Microelectromechanical systems series
|
| Subjects: | |
| Physical Description: | XIX, 265 S. Ill., graph. Darst. |
| ISBN: | 0890065810 |
Staff View
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| 245 | 1 | 0 | |a An introduction to microelectromechanical systems engineering |c Nadim Maluf |
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Record in the Search Index
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| author | Maluf, Nadim |
| author_facet | Maluf, Nadim |
| author_role | aut |
| author_sort | Maluf, Nadim |
| author_variant | n m nm |
| building | Verbundindex |
| bvnumber | BV013046751 |
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| ctrlnum | (OCoLC)247848513 (DE-599)BVBBV013046751 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| format | Book |
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| id | DE-604.BV013046751 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:38:13Z |
| institution | BVB |
| isbn | 0890065810 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008889082 |
| oclc_num | 247848513 |
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| physical | XIX, 265 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Artech House |
| record_format | marc |
| series2 | Microelectromechanical systems series |
| spelling | Maluf, Nadim Verfasser aut An introduction to microelectromechanical systems engineering Nadim Maluf Boston [u.a.] Artech House 2000 XIX, 265 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microelectromechanical systems series Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 MEMS (DE-588)4824724-8 s 1\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Maluf, Nadim An introduction to microelectromechanical systems engineering Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)4824724-8 |
| title | An introduction to microelectromechanical systems engineering |
| title_auth | An introduction to microelectromechanical systems engineering |
| title_exact_search | An introduction to microelectromechanical systems engineering |
| title_full | An introduction to microelectromechanical systems engineering Nadim Maluf |
| title_fullStr | An introduction to microelectromechanical systems engineering Nadim Maluf |
| title_full_unstemmed | An introduction to microelectromechanical systems engineering Nadim Maluf |
| title_short | An introduction to microelectromechanical systems engineering |
| title_sort | an introduction to microelectromechanical systems engineering |
| topic | Microelectromechanical systems Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems Mikroelektronik Mikromechanik MEMS |
| work_keys_str_mv | AT malufnadim anintroductiontomicroelectromechanicalsystemsengineering |