APA (7th ed.) Citation

(2000). Sub-half-micron lithography for ULSIs (1. publ.). Cambridge Univ. Press.

Chicago Style (17th ed.) Citation

Sub-half-micron Lithography for ULSIs. 1. publ. Cambridge [u.a.]: Cambridge Univ. Press, 2000.

MLA (9th ed.) Citation

Sub-half-micron Lithography for ULSIs. 1. publ. Cambridge Univ. Press, 2000.