Micro-optics and lithography:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Brussels
VUBPress
1997
|
| Subjects: | |
| Physical Description: | 206 S. Ill., graph. Darst. |
| ISBN: | 9054871679 |
Staff View
MARC
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Record in the Search Index
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|---|---|
| any_adam_object | |
| author | Kufner, Maria Kufner, Stefan |
| author_facet | Kufner, Maria Kufner, Stefan |
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| author_sort | Kufner, Maria |
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| building | Verbundindex |
| bvnumber | BV012910000 |
| callnumber-first | T - Technology |
| callnumber-label | TA1660 |
| callnumber-raw | TA1660 |
| callnumber-search | TA1660 |
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| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)37349228 (DE-599)BVBBV012910000 |
| dewey-full | 621.36/93 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.36/93 |
| dewey-search | 621.36/93 |
| dewey-sort | 3621.36 293 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV012910000 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:35:52Z |
| institution | BVB |
| isbn | 9054871679 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008787214 |
| oclc_num | 37349228 |
| open_access_boolean | |
| owner | DE-703 DE-522 DE-858 |
| owner_facet | DE-703 DE-522 DE-858 |
| physical | 206 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | VUBPress |
| record_format | marc |
| spelling | Kufner, Maria Verfasser aut Micro-optics and lithography Maria Kufner ; Stefan Kufner Brussels VUBPress 1997 206 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microlithographie ram Optique des microondes ram Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik (DE-588)4362762-6 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Mikrooptik (DE-588)4362762-6 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Kufner, Stefan Verfasser aut |
| spellingShingle | Kufner, Maria Kufner, Stefan Micro-optics and lithography Microlithographie ram Optique des microondes ram Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik (DE-588)4362762-6 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4362762-6 (DE-588)4191584-7 |
| title | Micro-optics and lithography |
| title_auth | Micro-optics and lithography |
| title_exact_search | Micro-optics and lithography |
| title_full | Micro-optics and lithography Maria Kufner ; Stefan Kufner |
| title_fullStr | Micro-optics and lithography Maria Kufner ; Stefan Kufner |
| title_full_unstemmed | Micro-optics and lithography Maria Kufner ; Stefan Kufner |
| title_short | Micro-optics and lithography |
| title_sort | micro optics and lithography |
| topic | Microlithographie ram Optique des microondes ram Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik (DE-588)4362762-6 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Microlithographie Optique des microondes Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT kufnermaria microopticsandlithography AT kufnerstefan microopticsandlithography |