Micro-optics and lithography:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Brussels
VUBPress
1997
|
| Schlagworte: | |
| Beschreibung: | 206 S. Ill., graph. Darst. |
| ISBN: | 9054871679 |
Internformat
MARC
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|---|---|---|---|
| 001 | BV012910000 | ||
| 003 | DE-604 | ||
| 005 | 20000609 | ||
| 007 | t | ||
| 008 | 991215s1997 ad|| |||| 00||| eng d | ||
| 020 | |a 9054871679 |9 90-5487-167-9 | ||
| 035 | |a (OCoLC)37349228 | ||
| 035 | |a (DE-599)BVBBV012910000 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-522 |a DE-858 | ||
| 050 | 0 | |a TA1660 | |
| 082 | 0 | |a 621.36/93 |2 21 | |
| 084 | |a ZN 4170 |0 (DE-625)157366: |2 rvk | ||
| 100 | 1 | |a Kufner, Maria |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Micro-optics and lithography |c Maria Kufner ; Stefan Kufner |
| 264 | 1 | |a Brussels |b VUBPress |c 1997 | |
| 300 | |a 206 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 7 | |a Microlithographie |2 ram | |
| 650 | 7 | |a Optique des microondes |2 ram | |
| 650 | 4 | |a Integrated circuits |x Masks | |
| 650 | 4 | |a Integrated optics | |
| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Optical interconnects | |
| 650 | 0 | 7 | |a Mikrooptik |0 (DE-588)4362762-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Mikrooptik |0 (DE-588)4362762-6 |D s |
| 689 | 0 | 1 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Kufner, Stefan |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008787214 | ||
Datensatz im Suchindex
| _version_ | 1804127596403752960 |
|---|---|
| any_adam_object | |
| author | Kufner, Maria Kufner, Stefan |
| author_facet | Kufner, Maria Kufner, Stefan |
| author_role | aut aut |
| author_sort | Kufner, Maria |
| author_variant | m k mk s k sk |
| building | Verbundindex |
| bvnumber | BV012910000 |
| callnumber-first | T - Technology |
| callnumber-label | TA1660 |
| callnumber-raw | TA1660 |
| callnumber-search | TA1660 |
| callnumber-sort | TA 41660 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)37349228 (DE-599)BVBBV012910000 |
| dewey-full | 621.36/93 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.36/93 |
| dewey-search | 621.36/93 |
| dewey-sort | 3621.36 293 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV012910000 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:35:52Z |
| institution | BVB |
| isbn | 9054871679 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008787214 |
| oclc_num | 37349228 |
| open_access_boolean | |
| owner | DE-703 DE-522 DE-858 |
| owner_facet | DE-703 DE-522 DE-858 |
| physical | 206 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | VUBPress |
| record_format | marc |
| spelling | Kufner, Maria Verfasser aut Micro-optics and lithography Maria Kufner ; Stefan Kufner Brussels VUBPress 1997 206 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microlithographie ram Optique des microondes ram Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik (DE-588)4362762-6 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Mikrooptik (DE-588)4362762-6 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Kufner, Stefan Verfasser aut |
| spellingShingle | Kufner, Maria Kufner, Stefan Micro-optics and lithography Microlithographie ram Optique des microondes ram Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik (DE-588)4362762-6 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4362762-6 (DE-588)4191584-7 |
| title | Micro-optics and lithography |
| title_auth | Micro-optics and lithography |
| title_exact_search | Micro-optics and lithography |
| title_full | Micro-optics and lithography Maria Kufner ; Stefan Kufner |
| title_fullStr | Micro-optics and lithography Maria Kufner ; Stefan Kufner |
| title_full_unstemmed | Micro-optics and lithography Maria Kufner ; Stefan Kufner |
| title_short | Micro-optics and lithography |
| title_sort | micro optics and lithography |
| topic | Microlithographie ram Optique des microondes ram Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik (DE-588)4362762-6 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Microlithographie Optique des microondes Integrated circuits Masks Integrated optics Microlithography Optical interconnects Mikrooptik Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT kufnermaria microopticsandlithography AT kufnerstefan microopticsandlithography |