1997 International Conference on Simulation of Semiconductor Processes and Devices: Cambridge, MA, USA, september 8 - 10, 1997
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Bibliographic Details
Corporate Author: International Conference on Simulation of Semiconductor Processes and Devices Cambridge, Mass (Author)
Format: Conference Proceeding Book
Language:English
Published: Piscataway, NJ Inst. of Electrical and Electronics Engineers 1997
Subjects:
Physical Description:XII, 353 S. Ill., zahlr. graph. Darst.
ISBN:0780337751
078033776X

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