Silicon micromachining:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Cambridge
Cambridge Univ. Press
1998
|
| Edition: | 1. publ. |
| Series: | Cambridge studies in semiconductor physics and microelectronic engineering
7 |
| Subjects: | |
| Physical Description: | XIII, 405 S. Ill., graph. Darst. |
| ISBN: | 052159054X |
Staff View
MARC
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| 245 | 1 | 0 | |a Silicon micromachining |c M. Elwenspoek and H. V. Jansen |
| 250 | |a 1. publ. | ||
| 264 | 1 | |a Cambridge |b Cambridge Univ. Press |c 1998 | |
| 300 | |a XIII, 405 S. |b Ill., graph. Darst. | ||
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| 650 | 4 | |a Etching | |
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| 650 | 4 | |a Silicon | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
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Record in the Search Index
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| author_sort | Elwenspoek, Miko 1949- |
| author_variant | m e me h v j hv hvj |
| building | Verbundindex |
| bvnumber | BV012779251 |
| callnumber-first | T - Technology |
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| classification_rvk | UQ 2800 ZN 4980 |
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| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. publ. |
| format | Book |
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| id | DE-604.BV012779251 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:33:31Z |
| institution | BVB |
| isbn | 052159054X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008691055 |
| oclc_num | 632699736 |
| open_access_boolean | |
| owner | DE-703 DE-355 DE-BY-UBR |
| owner_facet | DE-703 DE-355 DE-BY-UBR |
| physical | XIII, 405 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Cambridge Univ. Press |
| record_format | marc |
| series | Cambridge studies in semiconductor physics and microelectronic engineering |
| series2 | Cambridge studies in semiconductor physics and microelectronic engineering |
| spelling | Elwenspoek, Miko 1949- Verfasser (DE-588)12212183X aut Silicon micromachining M. Elwenspoek and H. V. Jansen 1. publ. Cambridge Cambridge Univ. Press 1998 XIII, 405 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Cambridge studies in semiconductor physics and microelectronic engineering 7 Etching Micromachining Silicon Silicium (DE-588)4077445-4 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Silicium (DE-588)4077445-4 s Ätzen (DE-588)4000648-7 s DE-604 Mikromechanik (DE-588)4205811-9 s Jansen, Henri V. Verfasser aut Cambridge studies in semiconductor physics and microelectronic engineering 7 (DE-604)BV009142123 7 |
| spellingShingle | Elwenspoek, Miko 1949- Jansen, Henri V. Silicon micromachining Cambridge studies in semiconductor physics and microelectronic engineering Etching Micromachining Silicon Silicium (DE-588)4077445-4 gnd Mikromechanik (DE-588)4205811-9 gnd Ätzen (DE-588)4000648-7 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4205811-9 (DE-588)4000648-7 |
| title | Silicon micromachining |
| title_auth | Silicon micromachining |
| title_exact_search | Silicon micromachining |
| title_full | Silicon micromachining M. Elwenspoek and H. V. Jansen |
| title_fullStr | Silicon micromachining M. Elwenspoek and H. V. Jansen |
| title_full_unstemmed | Silicon micromachining M. Elwenspoek and H. V. Jansen |
| title_short | Silicon micromachining |
| title_sort | silicon micromachining |
| topic | Etching Micromachining Silicon Silicium (DE-588)4077445-4 gnd Mikromechanik (DE-588)4205811-9 gnd Ätzen (DE-588)4000648-7 gnd |
| topic_facet | Etching Micromachining Silicon Silicium Mikromechanik Ätzen |
| volume_link | (DE-604)BV009142123 |
| work_keys_str_mv | AT elwenspoekmiko siliconmicromachining AT jansenhenriv siliconmicromachining |