APA (7th ed.) Citation

Elwenspoek, M., & Jansen, H. V. (1998). Silicon micromachining (1. publ.). Cambridge Univ. Press.

Chicago Style (17th ed.) Citation

Elwenspoek, Miko, and Henri V. Jansen. Silicon Micromachining. 1. publ. Cambridge: Cambridge Univ. Press, 1998.

MLA (9th ed.) Citation

Elwenspoek, Miko, and Henri V. Jansen. Silicon Micromachining. 1. publ. Cambridge Univ. Press, 1998.

Warning: These citations may not always be 100% accurate.