APA (7th ed.) Citation

(1998). Semiconductor process and device performance modelling: Symposium held December 2 - 3, 1997, Boston, Massachusetts, U.S.A. Materials Research Soc.

Chicago Style (17th ed.) Citation

Semiconductor Process and Device Performance Modelling: Symposium Held December 2 - 3, 1997, Boston, Massachusetts, U.S.A. Warrendale, Pa: Materials Research Soc, 1998.

MLA (9th ed.) Citation

Semiconductor Process and Device Performance Modelling: Symposium Held December 2 - 3, 1997, Boston, Massachusetts, U.S.A. Materials Research Soc, 1998.