Diagnostic techniques for semiconductor materials processing II: symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A.
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Pittsburgh, Pa.
Materials Research Soc.
1996
|
| Series: | Materials Research Society: Materials Research Society symposia proceedings
406 |
| Subjects: | |
| Physical Description: | XV, 585 S. Ill., graph. Darst. |
| ISBN: | 1558993096 |
Staff View
MARC
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Record in the Search Index
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| author_facet | Pang, Stella W. Symposium on Diagnostic Techniques for Semiconductor Materials Processing Boston, Mass |
| author_sort | Symposium on Diagnostic Techniques for Semiconductor Materials Processing Boston, Mass |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1995 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1995 Boston Mass. |
| id | DE-604.BV012723134 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:32:33Z |
| institution | BVB |
| institution_GND | (DE-588)5183453-4 |
| isbn | 1558993096 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008649943 |
| oclc_num | 34191076 |
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| physical | XV, 585 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Symposium on Diagnostic Techniques for Semiconductor Materials Processing 2 1995 Boston, Mass. Verfasser (DE-588)5183453-4 aut Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. ed.: Stella W. Pang ... Pittsburgh, Pa. Materials Research Soc. 1996 XV, 585 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 406 Semiconductors Testing Congresses Prüfprogramm (DE-588)4268583-7 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Boston Mass. gnd-content Halbleitertechnologie (DE-588)4158814-9 s Prüfprogramm (DE-588)4268583-7 s DE-604 Pang, Stella W. edt Materials Research Society: Materials Research Society symposia proceedings 406 (DE-604)BV001899105 406 |
| spellingShingle | Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Semiconductors Testing Congresses Prüfprogramm (DE-588)4268583-7 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4268583-7 (DE-588)4158814-9 (DE-588)1071861417 |
| title | Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. |
| title_auth | Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. |
| title_exact_search | Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. |
| title_full | Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. ed.: Stella W. Pang ... |
| title_fullStr | Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. ed.: Stella W. Pang ... |
| title_full_unstemmed | Diagnostic techniques for semiconductor materials processing II symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. ed.: Stella W. Pang ... |
| title_short | Diagnostic techniques for semiconductor materials processing II |
| title_sort | diagnostic techniques for semiconductor materials processing ii symposium held november 27 30 1995 boston massachusetts u s a |
| title_sub | symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. |
| topic | Semiconductors Testing Congresses Prüfprogramm (DE-588)4268583-7 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Semiconductors Testing Congresses Prüfprogramm Halbleitertechnologie Konferenzschrift 1995 Boston Mass. |
| volume_link | (DE-604)BV001899105 |
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