APA (7th ed.) Citation

Symposium on Diagnostic Techniques for Semiconductor Materials Processing Boston, Mass, & Pang, S. W. (1996). Diagnostic techniques for semiconductor materials processing II: Symposium held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. Materials Research Soc.

Chicago Style (17th ed.) Citation

Symposium on Diagnostic Techniques for Semiconductor Materials Processing Boston, Mass, and Stella W. Pang. Diagnostic Techniques for Semiconductor Materials Processing II: Symposium Held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. Pittsburgh, Pa: Materials Research Soc, 1996.

MLA (9th ed.) Citation

Symposium on Diagnostic Techniques for Semiconductor Materials Processing Boston, Mass, and Stella W. Pang. Diagnostic Techniques for Semiconductor Materials Processing II: Symposium Held November 27 - 30, 1995, Boston, Massachusetts, U.S.A. Materials Research Soc, 1996.