APA-Zitierstil (7. Ausg.)

Powell, R. A., & Rossnagel, S. M. (1999). PVD for microelectronics: Sputter deposition applied to semiconductor manufacturing. Acad. Press.

Chicago-Zitierstil (17. Ausg.)

Powell, Ronald A., und Stephen M. Rossnagel. PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. San Diego [u.a.]: Acad. Press, 1999.

MLA-Zitierstil (9. Ausg.)

Powell, Ronald A., und Stephen M. Rossnagel. PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. Acad. Press, 1999.