Microlithography: science and technology
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York [u.a.]
Dekker
1998
|
| Subjects: | |
| Physical Description: | XII, 780 S. Ill., graph. Darst. |
| ISBN: | 0824799534 |
Staff View
MARC
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| 245 | 1 | 0 | |a Microlithography |b science and technology |c ed. by James R. Sheats ... |
| 264 | 1 | |a New York [u.a.] |b Dekker |c 1998 | |
| 300 | |a XII, 780 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 650 | 4 | |a Circuits intégrés - Masques | |
| 650 | 4 | |a Fabrication | |
| 650 | 4 | |a MOS complémentaires - Conception et construction | |
| 650 | 4 | |a Microlithographie - Applications industrielles | |
| 650 | 4 | |a Integrated circuits |x Masks | |
| 650 | 4 | |a Manufacturing processes | |
| 650 | 4 | |a Metal oxide semiconductors, Complementary |x Design and construction | |
| 650 | 4 | |a Microlithography |x Industrial applications | |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Maskentechnik |0 (DE-588)4125845-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | 1 | |a Maskentechnik |0 (DE-588)4125845-9 |D s |
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| 700 | 1 | |a Sheats, James R. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008463819 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Record in the Search Index
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| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV012471516 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:28:10Z |
| institution | BVB |
| isbn | 0824799534 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008463819 |
| oclc_num | 38765112 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | XII, 780 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Dekker |
| record_format | marc |
| spelling | Microlithography science and technology ed. by James R. Sheats ... New York [u.a.] Dekker 1998 XII, 780 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Circuits intégrés - Masques Fabrication MOS complémentaires - Conception et construction Microlithographie - Applications industrielles Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Maskentechnik (DE-588)4125845-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s Maskentechnik (DE-588)4125845-9 s 1\p DE-604 Sheats, James R. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Microlithography science and technology Circuits intégrés - Masques Fabrication MOS complémentaires - Conception et construction Microlithographie - Applications industrielles Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Maskentechnik (DE-588)4125845-9 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)4125845-9 |
| title | Microlithography science and technology |
| title_auth | Microlithography science and technology |
| title_exact_search | Microlithography science and technology |
| title_full | Microlithography science and technology ed. by James R. Sheats ... |
| title_fullStr | Microlithography science and technology ed. by James R. Sheats ... |
| title_full_unstemmed | Microlithography science and technology ed. by James R. Sheats ... |
| title_short | Microlithography |
| title_sort | microlithography science and technology |
| title_sub | science and technology |
| topic | Circuits intégrés - Masques Fabrication MOS complémentaires - Conception et construction Microlithographie - Applications industrielles Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Maskentechnik (DE-588)4125845-9 gnd |
| topic_facet | Circuits intégrés - Masques Fabrication MOS complémentaires - Conception et construction Microlithographie - Applications industrielles Integrated circuits Masks Manufacturing processes Metal oxide semiconductors, Complementary Design and construction Microlithography Industrial applications Lithografie Halbleitertechnologie Maskentechnik |
| work_keys_str_mv | AT sheatsjamesr microlithographyscienceandtechnology |