Reactive crossed-beam laser ablation: application to the production of TiN thin films
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
1998
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| Schlagworte: | |
| Beschreibung: | Zürich, Univ., Diss., 1998. - Zsfassung in dt. Sprache |
| Beschreibung: | XII, 128 S. Ill., graph. Darst. |
Internformat
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| 100 | 1 | |a Timm, Roman Christian |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Reactive crossed-beam laser ablation |b application to the production of TiN thin films |c Roman Christian Timm |
| 264 | 1 | |c 1998 | |
| 300 | |a XII, 128 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Zürich, Univ., Diss., 1998. - Zsfassung in dt. Sprache | ||
| 502 | |a Zürich, Univ., Diss., 1998 | ||
| 650 | 0 | 7 | |a Laserablation |0 (DE-588)4279134-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Titannitrid |0 (DE-588)4185564-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Titannitrid |0 (DE-588)4185564-4 |D s |
| 689 | 0 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
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| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008455379 | ||
Datensatz im Suchindex
| _version_ | 1804127099084079104 |
|---|---|
| any_adam_object | |
| author | Timm, Roman Christian |
| author_facet | Timm, Roman Christian |
| author_role | aut |
| author_sort | Timm, Roman Christian |
| author_variant | r c t rc rct |
| building | Verbundindex |
| bvnumber | BV012460496 |
| classification_rvk | UH 5750 UP 7550 |
| ctrlnum | (OCoLC)51618482 (DE-599)BVBBV012460496 |
| discipline | Physik |
| format | Thesis Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV012460496 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:27:57Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008455379 |
| oclc_num | 51618482 |
| open_access_boolean | |
| owner | DE-29 DE-19 DE-BY-UBM DE-188 |
| owner_facet | DE-29 DE-19 DE-BY-UBM DE-188 |
| physical | XII, 128 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| record_format | marc |
| spelling | Timm, Roman Christian Verfasser aut Reactive crossed-beam laser ablation application to the production of TiN thin films Roman Christian Timm 1998 XII, 128 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zürich, Univ., Diss., 1998. - Zsfassung in dt. Sprache Zürich, Univ., Diss., 1998 Laserablation (DE-588)4279134-0 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Titannitrid (DE-588)4185564-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Titannitrid (DE-588)4185564-4 s Dünne Schicht (DE-588)4136925-7 s Laserablation (DE-588)4279134-0 s DE-604 |
| spellingShingle | Timm, Roman Christian Reactive crossed-beam laser ablation application to the production of TiN thin films Laserablation (DE-588)4279134-0 gnd Dünne Schicht (DE-588)4136925-7 gnd Titannitrid (DE-588)4185564-4 gnd |
| subject_GND | (DE-588)4279134-0 (DE-588)4136925-7 (DE-588)4185564-4 (DE-588)4113937-9 |
| title | Reactive crossed-beam laser ablation application to the production of TiN thin films |
| title_auth | Reactive crossed-beam laser ablation application to the production of TiN thin films |
| title_exact_search | Reactive crossed-beam laser ablation application to the production of TiN thin films |
| title_full | Reactive crossed-beam laser ablation application to the production of TiN thin films Roman Christian Timm |
| title_fullStr | Reactive crossed-beam laser ablation application to the production of TiN thin films Roman Christian Timm |
| title_full_unstemmed | Reactive crossed-beam laser ablation application to the production of TiN thin films Roman Christian Timm |
| title_short | Reactive crossed-beam laser ablation |
| title_sort | reactive crossed beam laser ablation application to the production of tin thin films |
| title_sub | application to the production of TiN thin films |
| topic | Laserablation (DE-588)4279134-0 gnd Dünne Schicht (DE-588)4136925-7 gnd Titannitrid (DE-588)4185564-4 gnd |
| topic_facet | Laserablation Dünne Schicht Titannitrid Hochschulschrift |
| work_keys_str_mv | AT timmromanchristian reactivecrossedbeamlaserablationapplicationtotheproductionoftinthinfilms |