Microoptics:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | German |
| Published: |
Weinheim [u.a.]
Wiley-VCH
1999
|
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | X, 418 S. Ill., graph. Darst. |
| ISBN: | 3527294287 |
Staff View
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Record in the Search Index
| _version_ | 1827858470335938560 |
|---|---|
| adam_text |
STEFAN SINZINGER, JIIRGEN JAHNS
MICROOPTICS
WILEY-VCH
WEINHEIM * NEW YORK * CHICHESTER
BRISBANE * SINGAPORE * TORONTO
CONTENTS
PREFACE 1
1 FROM MACROOPTICS TO MICROOPTICS * AN OVERVIEW 3
1.1 OPTICS TECHNOLOGY 3
1.2 CLASSIFICATION OF OPTICAL HARDWARE 5
1.3 OPTICAL FUNCTIONS AND THEIR IMPLEMENTATION 6
1.4 SCOPE OF THIS BOOK 10
1.5 ORGANIZATION OF THE BOOK 10
1.6 FURTHER READING 12
1.7 ACKNOWLEDGMENT . 13
2 OPTICAL COMPONENTS WITH SMALL DIMENSIONS 15
2.1 MICROLENS PERFORMANCE 15
2.1.1 DIFFRACTION LIMIT 15
2.1.2 ABERRATIONS 17
2.1.3 QUALITY CRITERIA FOR LENS PERFORMANCE 21
2.2 SCALING * FROM MACRO- TO MICRO-COMPONENTS 27
2.2.1 SCALING OF DIFFRACTIVE AND REFRACTIVE LENSES 27
2.2.2 SCALING OF PRISMS 30
2.3 GLOSSARY 32
2.4 LIST OF SYMBOLS 33
2.5 EXERCISES 34
3 LITHOGRAPHIC FABRICATION TECHNOLOGY 37
3.1 PATTERN GENERATION 38
3.1.1 PLOTTING AND PHOTOREDUCTION 40
3.1.2 LASER BEAM WRITING . ., 40
3.1.3 X-RAY AND E-BEAM WRITING 42
3.1.4 GREY-LEVEL MASKS 47
3.1.5 SPECIAL MASKS 50
3.2 COATING OR THIN LAYER DEPOSITION 50
3.2.1 SPIN COATING 51
VI CONTENTS
3.2.2 PHYSICAL VAPOUR DEPOSITION (PVD) 51
3.2.3 CHEMICAL VAPOUR DEPOSITION (CVD) 54
3.3 ALIGNMENT AND EXPOSURE 54
3.3.1 EXPOSURE GEOMETRY 55
3.3.2 LIGHT SOURCES FOR MASK LITHOGRAPHY 57
3.3.3 ILLUMINATION WITH X-RAY (SYNCHROTRON) AND PROTON RADIATION 58
3.3.4 MULTIMASK ALIGNMENT 59
3.3.5 THROUGH-WAFER ALIGNMENT 61
3.4 PATTERN TRANSFER 61
3.4.1 ETCHING 63
3.4.2 LASER MICROMACHINING * LASER INITIATED ABLATION 68
3.4.3 MECHANICAL MICROMACHINING * DIAMOND TURNING OF MICROOP-
TICAL COMPONENTS 69
3.4.4 REPLICATION OF MICRORELIEF STRUCTURES 70
3.4.5 DIFFUSION * ION-EXCHANGE PROCESSES 73
3.5 BONDING OF PLANAR STRUCTURES 73
3.5.1 FLIP-CHIP BONDING 74
3.5.2 THERMO-ANODIC BONDING 76
3.6 GLOSSARY 78
3.7 LIST OF NEW SYMBOLS 79
3.8 EXERCISES .80
4 REFRACTIVE MICROOPTICS 85
4.1 SURFACE PROFILE MICROLENSES 86
4.1.1 MELTED PHOTORESIST LENSES * REFLOW LENSES 86
4.1.2 MICROLENS FABRICATION BY MASS TRANSPORT MECHANISMS IN
SEMICONDUCTORS 93
4.1.3 MICROLENSES FORMED BY VOLUME CHANGE OF A SUBSTRATE MATERIAL 94
4.1.4 LITHOGRAPHICALLY INITIATED VOLUME GROWTH IN PMMA FOR
MICROLENS FABRICATION 96
4.1.5 DISPENSED OR DROPLET MICROLENSES 99
4.1.6 DIRECT WRITING TECHNIQUES FOR REFRACTIVE MICROOPTICS 100
4.1.7 GREY-SCALE LITHOGRAPHY FOR ROE FABRICATION 103
4.2 GRADIENT-INDEX (GRIN)'OPTICS 104
4.2.1 GRIN ROD LENSES 105
4.2.2 PLANAR GRIN LENSES 108
4.3 MICROPRISMS AND MICROMIRRORS 115
4.3.1 LITHOGRAPHY FOR THE FABRICATION OF MICROPRISMS 116
4.3.2 MICROMACHINING OF MICROPRISMS USING SINGLE POINT DIAMOND
TURNING OR EMBOSSING 119
4.3.3 ANISOTROPIC ETCHING OF MIRROR STRUCTURES IN CRYSTALLINE MA-
TERIALS . . . .' 119
4.4 GLOSSARY 121
4.5 LIST OF NEW SYMBOLS 122
4.6 EXERCISES 123
CONTENTS VII
DIFFRACTIVE MICROOPTICS 129
5.1 TRADING SPATIAL RESOLUTION FOR REDUCED PHASE THICKNESS 129
5.1.1 BLAZING AND PHASE QUANTIZATION 129
5.1.2 ALTERNATIVE QUANTIZATION SCHEMES FOR MICROLENSES 132
5.1.3 EXAMPLES OF DIFFRACTIVE OPTICAL COMPONENTS 134
5.2 FABRICATION OF DIFFRACTIVE OPTICS 134
5.2.1 MULTIMASK PROCESSING FOR KINOFORM DOES 135
5.2.2 FABRICATION ERRORS FOR KINOFORM ELEMENTS 137
5.3 MODELLING OF DIFFRACTIVE OPTICS 139
5.3.1 APPROACHES TO RIGOROUS DIFFRACTION THEORY 140
5.3.2 THIN AND THICK GRATINGS * 143
5.3.3 SCALAR DIFFRACTION THEORY 145
5.3.4 FRESNEL AND FRAUNHOFER DIFFRACTION 147
5.3.5 LINEAR KINOFORM GRATING 148
5.3.6 DIFFRACTIVE LENSES 151
5.3.7 RAY-TRACING ANALYSIS OF DIFFRACTIVE LENSES 156
5.3.8 CHROMATIC ABERRATIONS OF DIFFRACTIVE LENSES 158
5.3.9 DETOUR-PHASE DIFFRACTIVE OPTICAL ELEMENTS 158
5.3.10 POLARISATION-SELECTIVE DIFFRACTIVE OPTICAL ELEMENTS 161
5.3.11 HOLOGRAPHIC OPTICAL ELEMENTS AS THICK BRAGG GRATINGS . 161
5.3.12 EFFECTIVE MEDIUM THEORY OF ZERO-ORDER GRATINGS 166
5.4 DESIGN OF DIFFRACTIVE OPTICAL ELEMENTS 167
5.4.1 DOES OPTIMIZED FOR IMAGING ALONG A TILTED OPTICAL AXIS . . 167
5.4.2 ITERATIVE DESIGN TECHNIQUES FOR DOES 169
5.5 GLOSSARY 172
5.6 LIST OF NEW SYMBOLS 173
5.7 EXERCISES 174
INTEGRATED WAVEGUIDE OPTICS 181
6.1 MODES IN OPTICAL WAVEGUIDES 181
6.1.1 DISCRETE WAVEGUIDE MODES 182
6.1.2 FIELD DISTRIBUTION OF THE MODES 184
6.2 WAVEGUIDE COUPLERS AND BEAM SPLITTERS 186
6.2.1 EXTERNAL COUPLING 186
6.2.2 COUPLING BETWEEN WAVEGUIDES 189
6.2.3 3 DB COUPLERS FOR BEAM SPLITTING 191
6.2.4 BRANCHING WAVEGUIDES 192
6.3 WAVEGUIDE OPTICAL MODULATORS 192
6.3.1 THE ELECTRO-OPTIC EFFECT 192
6.3.2 THE ELECTRO-OPTIC PHASE MODULATOR 193
6.3.3 POLARISATION MODULATOR * DYNAMIC PHASE RETARDER 193
6.3.4 INTEGRATED INTENSITY MODULATORS 194
6.3.5 ELECTRO-OPTIC DIRECTIONAL COUPLERS 195
VIII CONTENTS
6.4 APPLICATIONS OF WAVEGUIDE OPTICS 196
6.4.1 WAVEGUIDE OPTICS IN OPTICAL INTERCONNECTS 196
6.4.2 WAVEGUIDE OPTICAL SENSORS 199
6.5 GLOSSARY 202
6.6 LIST OF NEW SYMBOLS 203
6.7 EXERCISES 204
7 MICROOPTICAL SYSTEMS 207
7.1 SYSTEMS INTEGRATION 208
7.1.1 MOEMS FOR OPTICAL SYSTEMS INTEGRATION 208
7.1.2 STACKED OPTICS 211
7.1.3 PLANAR OPTICS 213
7.2 IMAGING SYSTEMS FOR OPTICAL INTERCONNECTS 215
7.2.1 DILUTE ARRAYS 215
7.2.2 CONVENTIONAL IMAGING 217
7.2.3 MULTICHANNEL IMAGING SYSTEM 218
7.2.4 HYBRID IMAGING 221
7.2.5 INTEGRATED MICROOPTICAL IMAGING SYSTEMS 222
7.3 GLOSSARY 226
7.4 LIST OF NEW SYMBOLS 227
7.5 EXERCISES 228
8 OPTOELECTRONIC DEVICES AND SMART PIXEL ARRAYS 231
8.1 SUPERLATTICES AND MULTIPLE QUANTUM WELLS 231
8.1.1 HETERO-SUPERLATTICES 232
8.1.2 NIPI-SUPERLATTICES 233
8.2 THE SEED (SELF-ELECTRO-OPTIC EFFECT DEVICE) 234
8.2.1 STRUCTURE AND FABRICATION 234
8.2.2 ENERGY DISSIPATION AND EFFICIENCY 235
8.2.3 ALL-OPTICAL MODULATION 236
8.2.4 S-SEED .--' 237
8.2.5 PERFORMANCE OF S-SEEDS 237
8.3 VERTICAL CAVITY SURFACE EMITTING LASERS 239
8.3.1 STRUCTURE AND FABRICATION 239
8.3.2 MIRRORS AND RESONATOR 242
8.3.3 I-V CHARACTERISTICS AND EFFICIENCY 244
8.3.4 SPECTRAL CHARACTERISTICS AND THERMAL EFFECTS 245
8.3.5 OTHER MATERIAL COMBINATIONS 246
8.4 SMART PIXEL ARRAYS (SPAS) 247
8.5 GLOSSARY 250
8.6 LIST OF NEW SYMBOLS 251
8.7 EXERCISES 252
CONTENTS IX
9 ARRAY ILLUMINATORS 255
9.1 IMAGE PLANE ARRAY ILLUMINATION 257
9.1.1 PHASE-CONTRAST ARRAY ILLUMINATION 258
9.1.2 MULTIPLE BEAM-SPLITTING THROUGH APERTURE DIVISION 262
9.1.3 MULTIPLE BEAM-SPLITTING THROUGH WAVEGUIDE COUPLING . 262
9.2 FRESNEL PLANE ARRAY ILLUMINATORS 263
9.3 FOURIER PLANE ARRAY ILLUMINATORS 266
9.3.1 DAMMANN GRATINGS 267
9.3.2 MODIFICATIONS OF DAMMANN'S DESIGN PROCEDURE 271
9.3.3 LENSLET ARRAYS AS FOURIER PLANE ARRAY ILLUMINATORS 273
9.3.4 CASCADING OF BEAM-SPLITTER GRATINGS 275
9.4 SUMMARY 275
9.5 GLOSSARY 277
9.6 LIST OF NEW SYMBOLS 278
9.7 EXERCISES 279
10 MICROOPTICAL COMPONENTS FOR BEAM SHAPING 283
10.1 BEAM SHAPING FROM A GENERAL PERSPECTIVE 285
10.2 LATERAL LASER BEAM SHAPING 288
10.2.1 COLLIMATION OF ASTIGMATIC BEAMS 288
10.2.2 BEAM SHAPING FOR LASER MACHINING 291
10.2.3 BEAM SHAPING FOR LIDAR 293
10.3 AXIAL BEAM SHAPING 294
10.4 TEMPORAL BEAM SHAPING 297
10.5 MULTIPLE APERTURE BEAM SHAPING 299
10.6 INTRA-CAVITY BEAM SHAPING 300
10.6.1 INTRA-CAVITY BEAM SHAPING OF INDIVIDUAL LASER BEAMS . . . .300
10.6.2 INTRA-CAVITY BEAM SHAPING OF ARRAYS OF LASER BEAMS 303
10.7 GLOSSARY 305
10.8 LIST OF NEW SYMBOLS 306
10.9 EXERCISES 307
11 MICROOPTICS FOR OPTICAL INFORMATION TECHNOLOGY 313
11.1 OPTICAL INFORMATION PROCESSING 313
11.1.1 ANALOG INFORMATION PROCESSING 313
11.1.2 DIGITAL OPTICAL INFORMATION PROCESSING 315
11.2 OPTICAL INTERCONNECTS 315
11.2.1 TERMINOLOGY 316
11.2.2 INTERCONNECT HIERARCHY 318
11.2.3 OPTICAL CLOCK DISTRIBUTION 322
11.3 MICROOPTICS FOR OPTICAL DATA STORAGE 323
11.3.1 BASICS OF OPTICAL DATA STORAGE 324
11.3.2 MICROOPTICS FOR READ/WRITE HEADS 327
X CONTENTS
11.3.3 VOLUME OPTICAL MEMORIES 334
11.4 GLOSSARY 340
11.5 LIST OF NEW SYMBOLS 342
11.6 EXERCISES 343
12 FURTHER APPLICATION AREAS OF MICROOPTICS 351
12.1 MICROLENS ARRAYS FOR IMAGING 352
12.2 BEAM STEERING WITH MICROOPTICAL COMPONENTS 355
12.3 MICROOPTICAL SENSORS 360
12.3.1 SHACK-HARTMANN WAVEFRONT SENSOR 360
12.3.2 CONFOCAL SENSING USING MICROOPTICS 361
12.4 MICROOPTICS FOR OPTICAL DESIGN 364
12.4.1 ACHROMATIC DIFFRACTIVE/REFRACTIVE DOUBLETS 364
12.4.2 MULTI-ORDER LENSES 366
12.4.3 ATHERMALIZATION WITH HYBRID ELEMENTS 368
12.5 GLOSSARY 371
12.6 LIST OF NEW SYMBOLS 372
12.7 EXERCISES 373
CONCLUSION 379
ABBREVIATIONS 381
SOLUTIONS TO EXERCISES 383 |
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| id | DE-604.BV012420722 |
| illustrated | Illustrated |
| indexdate | 2025-03-28T17:07:57Z |
| institution | BVB |
| isbn | 3527294287 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008428085 |
| oclc_num | 845100222 |
| open_access_boolean | |
| owner | DE-92 DE-20 DE-M347 DE-703 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-634 DE-83 DE-11 DE-29T |
| owner_facet | DE-92 DE-20 DE-M347 DE-703 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-634 DE-83 DE-11 DE-29T |
| physical | X, 418 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Sinzinger, Stefan Verfasser aut Microoptics Stefan Sinzinger ; Jürgen Jahns Weinheim [u.a.] Wiley-VCH 1999 X, 418 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Dispositifs optoélectroniques ram Lentilles (optique) ram Optique ram Optoélectronique Integrated optics Lenses Design and construction Optics Optoelectronic devices Mikrooptik (DE-588)4362762-6 gnd rswk-swf Mikrooptik (DE-588)4362762-6 s DE-604 Jahns, Jürgen 1953- Verfasser (DE-588)17408823X aut DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008428085&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Sinzinger, Stefan Jahns, Jürgen 1953- Microoptics Dispositifs optoélectroniques ram Lentilles (optique) ram Optique ram Optoélectronique Integrated optics Lenses Design and construction Optics Optoelectronic devices Mikrooptik (DE-588)4362762-6 gnd |
| subject_GND | (DE-588)4362762-6 |
| title | Microoptics |
| title_auth | Microoptics |
| title_exact_search | Microoptics |
| title_full | Microoptics Stefan Sinzinger ; Jürgen Jahns |
| title_fullStr | Microoptics Stefan Sinzinger ; Jürgen Jahns |
| title_full_unstemmed | Microoptics Stefan Sinzinger ; Jürgen Jahns |
| title_short | Microoptics |
| title_sort | microoptics |
| topic | Dispositifs optoélectroniques ram Lentilles (optique) ram Optique ram Optoélectronique Integrated optics Lenses Design and construction Optics Optoelectronic devices Mikrooptik (DE-588)4362762-6 gnd |
| topic_facet | Dispositifs optoélectroniques Lentilles (optique) Optique Optoélectronique Integrated optics Lenses Design and construction Optics Optoelectronic devices Mikrooptik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008428085&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT sinzingerstefan microoptics AT jahnsjurgen microoptics |