Holdings: Micro mechanical systems

Micro mechanical systems: principles and technology

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Bibliographic Details
Format:	Book
Language:	English
Published:	Amsterdam [u.a.] Elsevier 1998
Series:	Handbook of sensors and actuators 6
Subjects:	Engenharia eletrônica Tecnologia Microelectromechanical systems > Handbooks, manuals, etc Mikrosystemtechnik Mikrosensor Mikromechanik Mikroaktor
Physical Description:	VIII, 268 S. Ill., graph. Darst.
ISBN:	0444823638

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MARC


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Record in the Search Index

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id	DE-604.BV012363711
illustrated	Illustrated
indexdate	2024-07-09T18:26:15Z
institution	BVB
isbn	0444823638
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-008383953
oclc_num	39122892
open_access_boolean
owner	DE-703 DE-91G DE-BY-TUM DE-898 DE-BY-UBR DE-634
owner_facet	DE-703 DE-91G DE-BY-TUM DE-898 DE-BY-UBR DE-634
physical	VIII, 268 S. Ill., graph. Darst.
publishDate	1998
publishDateSearch	1998
publishDateSort	1998
publisher	Elsevier
record_format	marc
series	Handbook of sensors and actuators
series2	Handbook of sensors and actuators
spelling	Micro mechanical systems principles and technology ed. by T. Fukuda ... Micromechanical systems Amsterdam [u.a.] Elsevier 1998 VIII, 268 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Handbook of sensors and actuators 6 Engenharia eletrônica larpcal Tecnologia larpcal Microelectromechanical systems Handbooks, manuals, etc Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroaktor (DE-588)4620161-0 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s DE-604 Mikrosystemtechnik (DE-588)4221617-5 s Mikrosensor (DE-588)4561097-6 s 1\p DE-604 Mikroaktor (DE-588)4620161-0 s 2\p DE-604 Fukuda, Toshio Sonstige oth Handbook of sensors and actuators 6 (DE-604)BV010328312 6 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Micro mechanical systems principles and technology Handbook of sensors and actuators Engenharia eletrônica larpcal Tecnologia larpcal Microelectromechanical systems Handbooks, manuals, etc Mikrosystemtechnik (DE-588)4221617-5 gnd Mikrosensor (DE-588)4561097-6 gnd Mikromechanik (DE-588)4205811-9 gnd Mikroaktor (DE-588)4620161-0 gnd
subject_GND	(DE-588)4221617-5 (DE-588)4561097-6 (DE-588)4205811-9 (DE-588)4620161-0
title	Micro mechanical systems principles and technology
title_alt	Micromechanical systems
title_auth	Micro mechanical systems principles and technology
title_exact_search	Micro mechanical systems principles and technology
title_full	Micro mechanical systems principles and technology ed. by T. Fukuda ...
title_fullStr	Micro mechanical systems principles and technology ed. by T. Fukuda ...
title_full_unstemmed	Micro mechanical systems principles and technology ed. by T. Fukuda ...
title_short	Micro mechanical systems
title_sort	micro mechanical systems principles and technology
title_sub	principles and technology
topic	Engenharia eletrônica larpcal Tecnologia larpcal Microelectromechanical systems Handbooks, manuals, etc Mikrosystemtechnik (DE-588)4221617-5 gnd Mikrosensor (DE-588)4561097-6 gnd Mikromechanik (DE-588)4205811-9 gnd Mikroaktor (DE-588)4620161-0 gnd
topic_facet	Engenharia eletrônica Tecnologia Microelectromechanical systems Handbooks, manuals, etc Mikrosystemtechnik Mikrosensor Mikromechanik Mikroaktor
volume_link	(DE-604)BV010328312
work_keys_str_mv	AT fukudatoshio micromechanicalsystemsprinciplesandtechnology AT fukudatoshio micromechanicalsystems

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