APA (7th ed.) Citation

(1998). Micro mechanical systems: Principles and technology. Elsevier.

Chicago Style (17th ed.) Citation

Micro Mechanical Systems: Principles and Technology. Amsterdam [u.a.]: Elsevier, 1998.

MLA (9th ed.) Citation

Micro Mechanical Systems: Principles and Technology. Elsevier, 1998.

Warning: These citations may not always be 100% accurate.