Materials science in microelectronics: [1] The relationships between thin film processing and structure
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Croton-on-Hudson, NY
Giro Press
1995
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| Subjects: | |
| Physical Description: | XI, 228 S. graph. Darst. |
| ISBN: | 187885707X |
Staff View
MARC
| LEADER | 00000nam a2200000 cc4500 | ||
|---|---|---|---|
| 001 | BV012185428 | ||
| 003 | DE-604 | ||
| 005 | 19990209 | ||
| 007 | t | ||
| 008 | 981008s1995 d||| |||| 00||| eng d | ||
| 020 | |a 187885707X |9 1-878857-07-X | ||
| 035 | |a (OCoLC)313106343 | ||
| 035 | |a (DE-599)BVBBV012185428 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91G |a DE-11 |a DE-188 | ||
| 084 | |a UP 7500 |0 (DE-625)146433: |2 rvk | ||
| 084 | |a UQ 8050 |0 (DE-625)146587: |2 rvk | ||
| 100 | 1 | |a Machlin, Eugene S. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Materials science in microelectronics |n [1] |p The relationships between thin film processing and structure |c E. S. Machlin |
| 264 | 1 | |a Croton-on-Hudson, NY |b Giro Press |c 1995 | |
| 300 | |a XI, 228 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 773 | 0 | 8 | |w (DE-604)BV012185375 |g 1 |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-008258172 | ||
Record in the Search Index
| _version_ | 1804126802796347392 |
|---|---|
| any_adam_object | |
| author | Machlin, Eugene S. |
| author_facet | Machlin, Eugene S. |
| author_role | aut |
| author_sort | Machlin, Eugene S. |
| author_variant | e s m es esm |
| building | Verbundindex |
| bvnumber | BV012185428 |
| classification_rvk | UP 7500 UQ 8050 |
| ctrlnum | (OCoLC)313106343 (DE-599)BVBBV012185428 |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01077nam a2200325 cc4500</leader><controlfield tag="001">BV012185428</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19990209 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">981008s1995 d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">187885707X</subfield><subfield code="9">1-878857-07-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)313106343</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV012185428</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91G</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7500</subfield><subfield code="0">(DE-625)146433:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UQ 8050</subfield><subfield code="0">(DE-625)146587:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Machlin, Eugene S.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Materials science in microelectronics</subfield><subfield code="n">[1]</subfield><subfield code="p">The relationships between thin film processing and structure</subfield><subfield code="c">E. S. Machlin</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Croton-on-Hudson, NY</subfield><subfield code="b">Giro Press</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 228 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV012185375</subfield><subfield code="g">1</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-008258172</subfield></datafield></record></collection> |
| id | DE-604.BV012185428 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:23:15Z |
| institution | BVB |
| isbn | 187885707X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008258172 |
| oclc_num | 313106343 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-11 DE-188 |
| owner_facet | DE-91G DE-BY-TUM DE-11 DE-188 |
| physical | XI, 228 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Giro Press |
| record_format | marc |
| spelling | Machlin, Eugene S. Verfasser aut Materials science in microelectronics [1] The relationships between thin film processing and structure E. S. Machlin Croton-on-Hudson, NY Giro Press 1995 XI, 228 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s DE-604 (DE-604)BV012185375 1 |
| spellingShingle | Machlin, Eugene S. Materials science in microelectronics Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4136925-7 |
| title | Materials science in microelectronics |
| title_auth | Materials science in microelectronics |
| title_exact_search | Materials science in microelectronics |
| title_full | Materials science in microelectronics [1] The relationships between thin film processing and structure E. S. Machlin |
| title_fullStr | Materials science in microelectronics [1] The relationships between thin film processing and structure E. S. Machlin |
| title_full_unstemmed | Materials science in microelectronics [1] The relationships between thin film processing and structure E. S. Machlin |
| title_short | Materials science in microelectronics |
| title_sort | materials science in microelectronics the relationships between thin film processing and structure |
| topic | Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Dünne Schicht |
| volume_link | (DE-604)BV012185375 |
| work_keys_str_mv | AT machlineugenes materialsscienceinmicroelectronics1 |