Silicon devices: structures and processing
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | German |
| Veröffentlicht: |
Weinheim [u.a.]
Wiley-VCH
1998
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | 202 S. Ill., graph. Darst. |
| ISBN: | 352729595X |
Internformat
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| 245 | 1 | 0 | |a Silicon devices |b structures and processing |c ed. by Kenneth A. Jackson |
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| 650 | 4 | |a Diodes, Semiconductor | |
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Datensatz im Suchindex
| _version_ | 1804126769263935488 |
|---|---|
| adam_text | IMAGE 1
1 SILICON PROCESSING
JOHN G. WILKES +
FORMERLY WITH PHILIPS COMPONENTS LTD., SOUTHAMPTON, U.K.
LIST OF SYMBOLS AND ABBREVIATIONS 2
1.1 INTRODUCTION 5
1.2 METALLURGICAL-GRADE SILICON 7
1.3 SEMICONDUCTOR GRADE POLYCRYSTAL SILICON 11
1.3.1 THE CHLOROSILANE ROUTE 11
1.3.2 THE SILANE ROUTE 14
1.3.3 THE POLYCRYSTAL SILICON MARKET 16
1.4 SINGLE CRYSTAL SILICON 17
1.4.1 FLOAT-ZONED SILICON 17
1.4.2 NEUTRON TRANSMUTATION DOPED SILICON 19
1.4.3 CARBON AND NITROGEN IN FLOAT-ZONED SILICON 20
1.4.4 PERIODIC CRYSTAL GROWTH 22
1.5 CZOCHRALSKI SILICON 25
1.5.1 DISLOCATION-FREE SILICON 26
1.5.2 CONSTITUTIONAL SUPERCOOLING 28
1.5.3 THE INCORPORATION OF CARBON AND OXYGEN 30
1.5.4 MAGNETIC CZOCHRALSKI SILICON 33
1.5.5 THE COMMERCIAL SCALING OF CZOCHRALSKI SILICON 34
1.6 SLICE FABRICATION 36
1.6.1 MECHANICAL DAMAGE IN SILICON 36
1.6.2 POLISHING AND CLEANING 43
1.7 OXYGEN IN CZOCHRALSKI SILICON 44
1.7.1 THE BEHAVIOR OF OXYGEN IN SILICON 44
1.7.2 THE PRECIPITATION OF OXYGEN IN SILICON 45
1.7.3 THERMAL DONORS AND ENHANCED DIFFUSION 49
1.8 CRYSTAL ENGINEERING 51
1.8.1 EXTRINSIC GETTERING IN SILICON 51
1.8.2 INTRINSIC GETTERING IN SILICON 53
1.9 ACKNOWLEDGEMENTS 59
1.10 REFERENCES 60
|
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 661 - Technology of industrial chemicals |
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| discipline | Chemie / Pharmazie Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T18:22:43Z |
| institution | BVB |
| isbn | 352729595X |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008236063 |
| oclc_num | 632516405 |
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| physical | 202 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Silicon devices structures and processing ed. by Kenneth A. Jackson Weinheim [u.a.] Wiley-VCH 1998 202 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Silicon - Electric properties Diodes, Semiconductor Silicon crystals Electric properties Silicon diodes Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 s DE-604 Silicium (DE-588)4077445-4 s Halbleitertechnologie (DE-588)4158814-9 s Jackson, Kenneth A. Sonstige (DE-588)114714126 oth OEBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008236063&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Silicon devices structures and processing Silicon - Electric properties Diodes, Semiconductor Silicon crystals Electric properties Silicon diodes Halbleitertechnologie (DE-588)4158814-9 gnd Silicium (DE-588)4077445-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4077445-4 (DE-588)4181368-6 |
| title | Silicon devices structures and processing |
| title_auth | Silicon devices structures and processing |
| title_exact_search | Silicon devices structures and processing |
| title_full | Silicon devices structures and processing ed. by Kenneth A. Jackson |
| title_fullStr | Silicon devices structures and processing ed. by Kenneth A. Jackson |
| title_full_unstemmed | Silicon devices structures and processing ed. by Kenneth A. Jackson |
| title_short | Silicon devices |
| title_sort | silicon devices structures and processing |
| title_sub | structures and processing |
| topic | Silicon - Electric properties Diodes, Semiconductor Silicon crystals Electric properties Silicon diodes Halbleitertechnologie (DE-588)4158814-9 gnd Silicium (DE-588)4077445-4 gnd Siliciumbauelement (DE-588)4181368-6 gnd |
| topic_facet | Silicon - Electric properties Diodes, Semiconductor Silicon crystals Electric properties Silicon diodes Halbleitertechnologie Silicium Siliciumbauelement |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=008236063&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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