Integrated sensors, microactuators, & microsystems (MEMS):
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Piscataway, NJ
IEEE
1998
|
| Series: | Institute of Electrical and Electronics Engineers: Proceedings of the IEEE
86,8 : special issue |
| Subjects: | |
| Item Description: | NT: Special issue on integrated sensors, microactuators, and microsystems (MEMS). - Einzelaufnahme eines Zeitschriften-H. |
| Physical Description: | S. 1531 - 1811 Ill., graph. Darst. |
Staff View
MARC
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| 300 | |a S. 1531 - 1811 |b Ill., graph. Darst. | ||
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| 490 | 0 | |a Institute of Electrical and Electronics Engineers: Proceedings of the IEEE |v 86,8 : special issue | |
| 500 | |a NT: Special issue on integrated sensors, microactuators, and microsystems (MEMS). - Einzelaufnahme eines Zeitschriften-H. | ||
| 650 | 7 | |a Capteurs (technologie) |2 ram | |
| 650 | 7 | |a Dispositifs électromécaniques |2 ram | |
| 650 | 7 | |a Microactionneurs |2 ram | |
| 650 | 4 | |a Detectors | |
| 650 | 4 | |a Microactuators | |
| 650 | 4 | |a Microelectromechanical systems | |
| 700 | 1 | |a Wise, Kensall D. |e Sonstige |4 oth | |
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| id | DE-604.BV012128796 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:22:11Z |
| institution | BVB |
| language | English |
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| physical | S. 1531 - 1811 Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | IEEE |
| record_format | marc |
| series2 | Institute of Electrical and Electronics Engineers: Proceedings of the IEEE |
| spelling | Integrated sensors, microactuators, & microsystems (MEMS) [ed. by Kensall D. Wise] Special issue on integrated sensors, microactuators, and microsystems (MEMS) Piscataway, NJ IEEE 1998 S. 1531 - 1811 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Institute of Electrical and Electronics Engineers: Proceedings of the IEEE 86,8 : special issue NT: Special issue on integrated sensors, microactuators, and microsystems (MEMS). - Einzelaufnahme eines Zeitschriften-H. Capteurs (technologie) ram Dispositifs électromécaniques ram Microactionneurs ram Detectors Microactuators Microelectromechanical systems Wise, Kensall D. Sonstige oth |
| spellingShingle | Integrated sensors, microactuators, & microsystems (MEMS) Capteurs (technologie) ram Dispositifs électromécaniques ram Microactionneurs ram Detectors Microactuators Microelectromechanical systems |
| title | Integrated sensors, microactuators, & microsystems (MEMS) |
| title_alt | Special issue on integrated sensors, microactuators, and microsystems (MEMS) |
| title_auth | Integrated sensors, microactuators, & microsystems (MEMS) |
| title_exact_search | Integrated sensors, microactuators, & microsystems (MEMS) |
| title_full | Integrated sensors, microactuators, & microsystems (MEMS) [ed. by Kensall D. Wise] |
| title_fullStr | Integrated sensors, microactuators, & microsystems (MEMS) [ed. by Kensall D. Wise] |
| title_full_unstemmed | Integrated sensors, microactuators, & microsystems (MEMS) [ed. by Kensall D. Wise] |
| title_short | Integrated sensors, microactuators, & microsystems (MEMS) |
| title_sort | integrated sensors microactuators microsystems mems |
| topic | Capteurs (technologie) ram Dispositifs électromécaniques ram Microactionneurs ram Detectors Microactuators Microelectromechanical systems |
| topic_facet | Capteurs (technologie) Dispositifs électromécaniques Microactionneurs Detectors Microactuators Microelectromechanical systems |
| work_keys_str_mv | AT wisekensalld integratedsensorsmicroactuatorsmicrosystemsmems AT wisekensalld specialissueonintegratedsensorsmicroactuatorsandmicrosystemsmems |