Science and technology of semiconductor surface preparation: symposium held April 1 - 3, 1997, San Francisco, California, U.S.A.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Pittsburgh, Pa.
Materials Research Soc.
1997
|
| Series: | Materials Research Society: Materials Research Society symposia proceedings
477 |
| Subjects: | |
| Physical Description: | XIII, 545 S. Ill., graph. Darst. |
| ISBN: | 1558993819 |
Staff View
MARC
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| 245 | 1 | 0 | |a Science and technology of semiconductor surface preparation |b symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. |c ed.: Gregg S. Higashi ... |
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Record in the Search Index
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| callnumber-sort | TK 47871.85 |
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| classification_rvk | UD 8400 UP 7570 |
| ctrlnum | (OCoLC)37293365 (DE-599)BVBBV012122683 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1997 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 1997 San Francisco Calif. |
| id | DE-604.BV012122683 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:22:04Z |
| institution | BVB |
| isbn | 1558993819 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-008209279 |
| oclc_num | 37293365 |
| open_access_boolean | |
| owner | DE-29T DE-703 DE-83 |
| owner_facet | DE-29T DE-703 DE-83 |
| physical | XIII, 545 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. ed.: Gregg S. Higashi ... Pittsburgh, Pa. Materials Research Soc. 1997 XIII, 545 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 477 Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf Halbleiteroberfläche (DE-588)4137418-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 San Francisco Calif. gnd-content Halbleiteroberfläche (DE-588)4137418-6 s DE-604 Oberflächenbehandlung (DE-588)4042908-8 s 1\p DE-604 Higashi, Gregg S. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 477 (DE-604)BV001899105 477 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. Materials Research Society: Materials Research Society symposia proceedings Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Oberflächenbehandlung (DE-588)4042908-8 gnd Halbleiteroberfläche (DE-588)4137418-6 gnd |
| subject_GND | (DE-588)4042908-8 (DE-588)4137418-6 (DE-588)1071861417 |
| title | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. |
| title_auth | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. |
| title_exact_search | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. |
| title_full | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. ed.: Gregg S. Higashi ... |
| title_fullStr | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. ed.: Gregg S. Higashi ... |
| title_full_unstemmed | Science and technology of semiconductor surface preparation symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. ed.: Gregg S. Higashi ... |
| title_short | Science and technology of semiconductor surface preparation |
| title_sort | science and technology of semiconductor surface preparation symposium held april 1 3 1997 san francisco california u s a |
| title_sub | symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. |
| topic | Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Oberflächenbehandlung (DE-588)4042908-8 gnd Halbleiteroberfläche (DE-588)4137418-6 gnd |
| topic_facet | Semiconductors Cleaning Congresses Semiconductors Surfaces Congresses Surface chemistry Congresses Surface preparation Congresses Oberflächenbehandlung Halbleiteroberfläche Konferenzschrift 1997 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT higashigreggs scienceandtechnologyofsemiconductorsurfacepreparationsymposiumheldapril131997sanfranciscocaliforniausa |