APA (7th ed.) Citation

(1997). Science and technology of semiconductor surface preparation: Symposium held April 1 - 3, 1997, San Francisco, California, U.S.A. Materials Research Soc.

Chicago Style (17th ed.) Citation

Science and Technology of Semiconductor Surface Preparation: Symposium Held April 1 - 3, 1997, San Francisco, California, U.S.A. Pittsburgh, Pa: Materials Research Soc, 1997.

MLA (9th ed.) Citation

Science and Technology of Semiconductor Surface Preparation: Symposium Held April 1 - 3, 1997, San Francisco, California, U.S.A. Materials Research Soc, 1997.